{"id":2065,"date":"2025-08-04T13:09:38","date_gmt":"2025-08-04T05:09:38","guid":{"rendered":"https:\/\/firstnanosystem.com\/?p=2065"},"modified":"2025-08-04T13:42:52","modified_gmt":"2025-08-04T05:42:52","slug":"yanghuayinxiitobaomozhongyinglisuihoudubianhuadeyanjiuzongshu","status":"publish","type":"post","link":"https:\/\/firstnanosystem.com\/en\/archives\/2065","title":{"rendered":"\u6c27\u5316\u94df\u9521\uff08ITO\uff09\u8584\u819c\u4e2d\u5e94\u529b\u968f\u539a\u5ea6\u53d8\u5316\u7684\u7814\u7a76\u7efc\u8ff0"},"content":{"rendered":"

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\u672c\u671f\u8bfe\u7a0b:<\/span><\/strong>
\n\u6c27\u5316\u94df\u9521(ITO) \u8584\u819c\u4e2d\u5e94\u529b\u968f\u539a\u5ea6\u53d8\u5316\u7684\u7814\u7a76\u7efc\u8ff0<\/span><\/p>\n

 <\/p>\n

 <\/p>\n

\u80cc\u666f<\/strong><\/span><\/p>\n

 <\/p>\n

\u900f\u660e\u5bfc\u7535\u8584\u819c\u5728\u534a\u5bfc\u4f53\u5668\u4ef6\u4e2d\u6709\u5e7f\u6cdb\u5e94\u7528,\u5305\u62ec\u592a\u9633\u80fd\u7535\u6c60\u3001\u6db2\u6676\u663e\u793a\u5668\u3001\u53d1\u5149\u4e8c\u6781\u7ba1\u4ee5\u53ca\u5404\u79cd\u4f20\u611f\u5668\u7b49\u3002\u6c27\u5316\u94df\u9521(ITO) \u51ed\u501f\u5176\u4f18\u5f02\u7684\u7535\u5bfc\u7387\u3001\u5149\u5b66\u900f\u660e\u6027\u548c\u975e\u7ebf\u6027\u7684\u7279\u6027\u88ab\u5e7f\u6cdb\u7528\u4f5c\u900f\u660e\u5c42\u3002\u6e85\u5c04\u6cd5\u56e0\u80fd\u751f\u6210\u7ed3\u6784\u81f4\u5bc6\u4e14\u9ad8\u900f\u5c04\u7387\u7684\u8584\u819c,\u5728\u6c89\u79efITO\u8584\u819c\u65f6\u5907\u53d7\u9752\u7750\u3002<\/span><\/p>\n

\n\u5728\u8584\u819c\u751f\u957f\u8fc7\u7a0b\u4e2d,\u8bf1\u5bfc\u7684\u5e94\u529b\u4f1a\u5f71\u54cd\u5668\u4ef6\u7684\u5236\u9020\u548c\u6027\u80fd:<\/span>
\n– \u5e94\u529b\u5f15\u8d77\u7684\u6676\u5706\u7fd8\u66f2\u4f1a\u5f71\u54cd\u5668\u4ef6\u7684\u5e73\u6574\u5ea6\u53ca\u540e\u7eed\u751f\u4ea7\u5de5\u827a;<\/span>
\n– \u8584\u819c\u5e94\u529b\u53ef\u80fd\u6539\u53d8\u5668\u4ef6\u7684\u7269\u7406\u7279\u6027,\u4ece\u800c\u5f71\u54cd\u5176\u53ef\u9760\u6027\u3002<\/span><\/p>\n

 <\/p>\n

 <\/p>\n

\u5b9e\u9a8c\u6982\u8ff0<\/span><\/strong><\/p>\n

 <\/p>\n

\u9996\u5148,\u4f7f\u7528KLA Instruments\u2122 \u7684Filmetrics F50-UVX\u8584\u819c\u539a\u5ea6\u6d4b\u91cf\u4eea\u6d4b\u91cf\u4e86\u4e5d\u79cd\u4e0d\u540c\u539a\u5ea6\u7684ITO\u8584\u819c\u3002\u968f\u540e,\u4f7f\u7528KLA Instruments\u2122\u7684\u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eea HRP\u00ae-260(\u53f0\u9636\u4eea)\u6d4b\u91cf\u6676\u5706\u7fd8\u66f2\u548c\u5e94\u529b(\u89c1\u56fe 1)\u3002\u5728\u6676\u5706\u7fd8\u66f2\u6d4b\u91cf\u4e2d,\u7cfb\u7edf\u5728\u6bcf\u6b21\u626b\u63cf\u540e\u81ea\u52a8\u65cb\u8f6c\u6837\u54c1,\u751f\u6210\u4e09\u7ef4(3D)\u7fd8\u66f2\u56fe,\u5e76\u901a\u8fc7Stoney\u65b9\u7a0b\u81ea\u52a8\u8ba1\u7b97\u4e09\u7ef4\u5e94\u529b\u56fe(\u89c1\u56fe2)\u3002\u63a5\u7740,\u901a\u8fc7\u539f\u5b50\u529b\u663e\u5fae\u955c(AFM)\u8bc4\u4f30\u6c89\u79ef\u8584\u819c\u7684\u6676\u7c92\u7ed3\u6784(\u89c1\u56fe3 \u548c\u56fe4)\u3002\u6700\u540e,\u4f7f\u7528KLA Instruments\u2122\u7684Nano Indenter\u00ae G200X\u7eb3\u7c73\u538b\u75d5\u4eea\u8fdb\u884c\u7eb3\u7c73\u538b\u75d5\u6d4b\u8bd5\u4ee5\u8bc4\u4f30ITO\u8584\u819c\u7684\u5f39\u6027\u6a21\u91cf\u3002<\/span><\/p>\n

 <\/p>\n

 <\/p>\n

\u56fe\u793a\u8bf4\u660e<\/span><\/strong><\/span><\/p>\n

 <\/p>\n

\"\"<\/p>\n

 <\/p>\n

\u56fe1:(a) ITO (14nm)\/\u73bb\u7483\u76843D\u7fd8\u66f2\u56fe;<\/span><\/p>\n

(b) ITO (559nm)\/\u73bb\u7483\u76843D\u7fd8\u66f2\u56fe;<\/span><\/p>\n

(c) ITO\u539a\u5ea6\u4ece 14\u5230559nm\u7684ITO\/\u73bb\u7483\u76842D\u7fd8\u66f2\u56fe;<\/span><\/p>\n

(d)\u4e24\u6b21\u4e0d\u540c\u65f6\u95f4\u70b9\u6d4b\u5f97\u7684\u7fd8\u66f2\u4e0e\u539a\u5ea6\u5173\u7cfb\u3002<\/span><\/p>\n

 <\/p>\n

 <\/p>\n

\"\"<\/p>\n

 <\/p>\n

\u56fe2:\u4e0d\u540c\u539a\u5ea6\u4e0bITO\/\u73bb\u7483\u76843D\u5e94\u529b\u56fe(a)<\/span>
\ndITO=14nm; (b) d\u2081TO=45nm; (c) d\u2081TO=180nm; (d) diTo=559nm; (e) ITO\u8584\u819c\u7684\u5e94\u529b\u4e0e\u539a\u5ea6\u7684\u5173\u7cfb\u56fe\u3002<\/span><\/p>\n

 <\/p>\n

\"\"<\/p>\n

\"\"<\/p>\n

 <\/p>\n

 <\/p>\n

\u7ed3\u679c\u603b\u7ed3<\/span><\/strong><\/p>\n

 <\/p>\n

\u7814\u7a76\u8868\u660e,\u968f\u7740ITO\u8584\u819c\u539a\u5ea6\u7684\u589e\u52a0,\u5e94\u529b\u7c7b\u578b\u4ece\u62c9\u5e94\u529b\u8f6c\u53d8\u4e3a\u538b\u5e94\u529b\u3002AFM\u5206\u6790\u663e\u793aITO\u8584\u819c\u8868\u9762\u5448\u4e09\u7ef4\u751f\u957f\u6a21\u5f0f,\u6c89\u79ef\u8fc7\u7a0b\u4e2d\u6676\u7c92\u7ed3\u6784\u7531\u7b49\u8f74\u6676\u5411\u67f1\u72b6\u6676\u8f6c\u53d8\u3002<\/span>
\n\u8fdb\u4e00\u6b65\u5206\u6790\u53d1\u73b0,\u62c9\u5e94\u529b\u6765\u6e90\u4e8e\u65b0\u5f62\u6210\u7684\u7b49\u8f74\u6676\u7c92\u7684\u78b0\u649e\u4e0e\u805a\u5408\u3002\u968f\u7740\u8584\u819c\u539a\u5ea6\u589e\u52a0,\u7b49\u8f74\u6676\u7c92\u6570\u91cf\u51cf\u5c11,\u538b\u5e94\u529b\u9010\u6e10\u5360\u4e3b\u5bfc\u3002\u538b\u5e94\u529b\u5219\u5f52\u56e0\u4e8e\u67f1\u72b6\u6676\u7c92\u8fb9\u754c\u4e2d\u591a\u4f59\u7269\u8d28\u7684\u63ba\u5165\u3002<\/span><\/p>","protected":false},"excerpt":{"rendered":"

    \u672c\u671f\u8bfe\u7a0b: \u6c27\u5316\u94df\u9521(ITO) \u8584\u819c\u4e2d\u5e94\u529b\u968f\u539a\u5ea6\u53d8\u5316\u7684\u7814\u7a76\u7efc\u8ff0   &n […]<\/p>","protected":false},"author":1,"featured_media":2080,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[19],"tags":[],"class_list":["post-2065","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-xinwenzhongxin"],"acf":[],"_links":{"self":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts\/2065","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/comments?post=2065"}],"version-history":[{"count":6,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts\/2065\/revisions"}],"predecessor-version":[{"id":2083,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts\/2065\/revisions\/2083"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/media\/2080"}],"wp:attachment":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/media?parent=2065"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/categories?post=2065"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/tags?post=2065"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}