\u672c\u6b21\u7814\u7a76\uff0c\u5229\u7528KLA\u9ad8\u7cbe\u5ea6\u7eb3\u7c73\u538b\u75d5\u4eea\u7684DMA\u529f\u80fd\uff0c\u5728\u4f4e\u6e29\u6761\u4ef6\u4e0b\u5bf9SBR \u6a61\u80f6\u7684\u50a8\u5b58\u6a21\u91cf\u8fdb\u884c\u5206\u6790\u3002<\/span><\/p>\n <\/p>\n <\/p>\n <\/p>\n <\/p>\n <\/p>\n \u5b9e\u9a8c\u65b9\u6cd5<\/strong><\/span><\/p>\n <\/p>\n \u914d\u5907\u8f7d\u8377\u5206\u8fa8\u7387\u5c0f\u4e8e1nN\u7684IF50\u52a0\u8f7d\u5668\u548c 50\u03bcm \u76f4\u5f84\u7684\u5e73\u538b\u5934\u7684 KLA \u7eb3\u7c73\u538b\u75d5\uff0c\u5bf9\u5b89\u88c5\u5728\u5236\u51b7\u6837\u54c1\u53f0\u7684 SBR \u8fdb\u884cDMA\u6d4b\u8bd5\uff0c\u6837\u54c1\u53ef\u51b7\u5374\u5230 -60\u00b0C\u4ee5\u4e0b\uff0c\u6574\u4e2a\u53d8\u6e29\u8fc7\u7a0b\u7531PID\u63a7\u5236\uff0c\u52a0\u70ed\u548c\u51b7\u5374\u540c\u6b65\u5de5\u4f5c\uff0c\u6574\u4e2a\u6d4b\u8bd5\u4e2d\uff0c\u5236\u51b7\u6837\u54c1\u53f0\u7684\u5916\u58f3\u59cb\u7ec8\u7ef4\u6301\u5728\u5ba4\u6e29\u3002\u60f0\u6027\u6c14\u4f53\u5145\u6ee1\u6837\u54c1\u8154\u5ba4\uff0c\u4ee5\u51cf\u8f7b\u5176\u4e0e\u5927\u6c14\u7684\u5316\u5b66\u53cd\u5e94\uff0c\u5e76\u9632\u6b62\u5728\u6837\u54c1\u8868\u9762\u7ed3\u971c\u3002<\/span><\/p>\n <\/p>\n <\/p>\n <\/p>\n KLA DMA \u6d4b\u8bd5\u6280\u672f<\/strong><\/span><\/p>\n <\/p>\n ProbeDMA\u2122 \u662f\u4e00\u79cd\u52a8\u6001\u7eb3\u7c73\u538b\u75d5\u6d4b\u91cf\u6280\u672f\uff0c\u7528\u4e8e\u6d4b\u91cf\u4e0d\u540c\u9891\u7387\u4e0b\u7684\u6750\u6599\u7684\u7c98\u5f39\u6027\u3002ProbeDMA \u53ef\u5728\u6837\u54c1\u8868\u9762\u7684\u7279\u5b9a\u533a\u57df\u5b9a\u91cf\u7684\u8fdb\u884c\u52a8\u6001\u7279\u6027\u7684\u6d4b\u91cf\u3002\u6b64\u5916\uff0c\u76f8\u8f83\u4e0e\u4f20\u7edfDMA\u673a\u53f0\uff0cProbeDMA \u66f4\u53ef\u7cbe\u786e\u7684\u6d4b\u8bd5\u805a\u5408\u7269\u6d82\u5c42\u548c\u8584\u819c\u3002<\/span><\/p>\n ProbeDMA \u6d4b\u8bd5\u6d41\u7a0b\u5982\u4e0b\u56fe\u6240\u793a\u3002<\/span><\/p>\n <\/p>\n <\/p>\n ProbeDMA \u5728\u6240\u6709 KLA \u7eb3\u7c73\u538b\u75d5\u4e0a\u90fd\u53ef\u7528\uff0c\u4e14\u53ef\u4ee5\u4e0e\u5404\u79cd\u5e73\u538b\u5934\u914d\u5408\u4f7f\u7528\u3002KLA \u53ef\u5728\u5404\u4e2a\u538b\u75d5\u578b\u53f7\u4e0a\u63d0\u4f9b\u4ece -60\u00b0C \u5230 800\u00b0C \u7684\u53d8\u6e29\u6837\u54c1\u53f0\u3002\u8be5\u63a7\u6e29\u8303\u56f4\u53ef\u786e\u4fdd\u5728\u5404\u79cd\u6750\u6599\u4e0a\u8fdb\u884c\u53d8\u6e29\u5b9e\u9a8c\u548c\u8815\u53d8\u5b9e\u9a8c\u3002<\/span><\/p>\n <\/p>\n <\/p>\n <\/p>\n 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