{"id":2151,"date":"2025-08-05T10:34:03","date_gmt":"2025-08-05T02:34:03","guid":{"rendered":"https:\/\/firstnanosystem.com\/?p=2151"},"modified":"2025-08-05T10:34:03","modified_gmt":"2025-08-05T02:34:03","slug":"klakeleikuaisuyahenjishuduigeretucengdeceshi","status":"publish","type":"post","link":"https:\/\/firstnanosystem.com\/en\/archives\/2151","title":{"rendered":"\u200bKLA\u79d1\u78ca\u5feb\u901f\u538b\u75d5\u6280\u672f\u5bf9\u9694\u70ed\u6d82\u5c42\u7684\u6d4b\u8bd5"},"content":{"rendered":"

\u4ec0\u4e48\u662f\u9694\u70ed\u6d82\u5c42\uff1f<\/strong><\/span><\/p>\n

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\u9694\u70ed\u6d82\u5c42\uff08TBC\uff09<\/strong>\u662f\u4e00\u79cd\u591a\u5c42\u591a\u7ec4\u5206\u6750\u6599,\u5982\u4e0b\u56fe\u6240\u793a\uff0c\u5e94\u7528\u4e8e\u5404\u79cd\u7ed3\u6784\u6027\u7ec4\u4ef6\u4e2d\u63d0\u4f9b\u9694\u70ed\u548c\u6297\u6c27\u5316\u7684\u4fdd\u62a4\u529f\u80fd1\u3002TBC\u4e2d\u4e0d\u540c\u7684\u5fae\u89c2\u7ed3\u6784\u7279\u5f81\uff0c\u5982\u70ed\u55b7\u6d82\u6d82\u5c42\u7684\u8584\u819c\u8fb9\u754c\u3001\u5b54\u9699\u5ea6\u3001\u6d82\u5c42\u95f4\u754c\u9762\u3001\u88c2\u7eb9\u7b49\uff0c\u901a\u5e38\u4f1a\u6781\u5927\u5730\u589e\u52a0\u6d4b\u8bd5\u7684\u96be\u5ea6\u3002<\/span><\/p>\n

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\"\"<\/p>\n

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\"\"<\/p>\n

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\u56fe 1. \uff08a\uff09\u591a\u5c42\u3001\u591a\u529f\u80fd\u7684\u9694\u70ed\u6d82\u5c42\u7684\u793a\u610f\u56fe\u300aMRS Bulletin\u300b\uff08b\uff09\u9694\u70ed\u6d82\u5c42\u7684\u6a2a\u622a\u9762\u7684\u626b\u63cf\u7535\u955c\u56fe<\/span><\/p>\n

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KLA Instruments\u7684\u6d4b\u8bd5\u65b9\u6cd5<\/strong><\/span><\/p>\n

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 <\/p>\n

\u5229\u7528KLA\u53d1\u660e\u7684\u00a0NanoBlitz 3D \u538b\u75d5\u6280\u672f<\/strong>\u5bf9TBC \u6d82\u5c42\u8fdb\u884c\u6d4b\u8bd5\uff0c\u6bcf\u4e2a\u538b\u75d5\u70b9\u6d4b\u8bd5\u53ea\u9700\u4e0d\u5230\u4e00\u79d2<\/strong>\uff0c\u53ef\u5728\u5fae\u7c73\u5c3a\u5ea6\u4e0a\u5bf9\u6d82\u5c42\u548c\u70ed\u5faa\u73af\u7c7b\u7684\u6837\u54c1\u7684\u7c98\u7ed3\u5c42\u3001\u8868\u5c42\u6d82\u5c42\u548c\u7c98\u7ed3\u5c42\u2014\u8868\u9762\u6d82\u5c42\u7684\u754c\u9762\u533a\u57df\u7b49\u8fdb\u884c\u5404\u79cd\u4e0d\u540c\u8303\u56f4\u7684Mapping\u6210\u50cf\uff0c\u5355\u5f20Mapping\u6700\u591a\u53ef\u8fbe100000\u4e2a\u538b\u75d5\u70b9\u3002<\/span><\/p>\n

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\u7ed3\u679c\u4e0e\u5206\u6790<\/strong><\/span><\/p>\n

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\n

\u7c98\u7ed3\u5c42\u2014\u8868\u9762\u6d82\u5c42\u7684\u754c\u9762\u533a\u57df\u662f TBC\u7814\u7a76\u7684\u91cd\u70b9\u4e4b\u4e00\uff0c\u5176\u5fae\u89c2\u7ed3\u6784\u53ca\u76f8\u5e94\u529b\u5b66\u6027\u80fd\u7684\u53d8\u5316\uff0c\u4f1a\u5f71\u54cd\u5230TBC \u7684\u70ed\u5faa\u73af\u5bff\u547d\u3002\u8be5\u754c\u9762\u5904\u6700\u91cd\u8981\u7684\u8003\u91cf\u5c31\u662f\u70ed\u751f\u957f\u6c27\u5316 (TGO) \u5c42\u7684\u5f62\u6210\uff0cTGO\u662f\u5728\u9ad8\u6e29\u6761\u4ef6\u4e0b\uff0c\u7c98\u7ed3\u5c42\u7684\u03b2-NiAl\u7684\u5185\u90e8\u6269\u6563\u94dd\u4e0e\u901a\u8fc7\u8868\u5c42\u6d82\u5c42\u6e17\u900f\u7684\u6c27\u53d1\u751f\u53cd\u5e94\u800c\u6210\uff0cTGO \u5c42\u53ef\u9632\u6b62\u7c98\u7ed3\u5c42\u548c\u4e0b\u9762\u7684\u886c\u5e95\u8fdb\u4e00\u6b65\u7684\u6c27\u5316\uff0c\u4f46TGO\u8d85\u8fc7\u4e00\u5b9a\u7684\u4e34\u754c\u539a\u5ea6\uff0c\u53c8\u4f1a\u5bfc\u81f4\u4e25\u91cd\u7684\u5e94\u53d8\u4e0d\u517c\u5bb9\u548c\u5e94\u529b\u5931\u914d\uff0c\u4ece\u800c\u4f7f TBC \u9010\u6e10\u635f\u574f\u5e76\u6700\u7ec8\u4ea7\u751f\u5265\u79bb2\u30013\u3002<\/span><\/p>\n<\/section>\n

\u4e0b\u56fe\u663e\u793a\u4e86\u5178\u578b\u7684\u7b49\u79bb\u5b50\u55b7\u6d82\u6d82\u5c42\u7684\u53d8\u5316\u8fc7\u7a0b\uff0cTGO \u7684\u539a\u5ea6\u4f1a\u968f\u7740\u70ed\u5faa\u73af\u6b21\u6570\u7684\u589e\u52a0\u800c\u589e\u5927\u3002\u5bf9\u5e94\u7684\u786c\u5ea6\u548c\u5f39\u6027\u6a21\u91cfMapping\u7ed3\u679c\u4e5f\u663e\u793a\u51fa\u7c7b\u4f3c\u7684\u8d8b\u52bf\uff0c\u540c\u65f6\uff0c\u4ece\u786c\u5ea6mapping\u56fe\u4e2d\u4e5f\u53ef\u4ee5\u89c2\u5bdf\u5230\u7c98\u7ed3\u5c42\u4e00\u4fa7\u7684\u4f5c\u4e3a\u94dd\u6e90\u7684 \u03b2-NiAl \u76f8\u968f\u70ed\u5faa\u73af\u6b21\u6570\u7684\u589e\u52a0\u800c\u9010\u6e10\u8017\u5c3d\u3002<\/span><\/p>\n

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\"\"<\/p>\n

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\u56fe 2. \uff08a\uff0c\u7b2c\u4e00\u5217\uff09\u6d82\u5c42\u72b6\u6001\u4e0b\u7684 TGO \u751f\u957f\u72b6\u51b5\u7684\u786c\u5ea6\u548c\u5f39\u6027\u6a21\u91cf mapping \u56fe\uff1b<\/span><\/p>\n

\uff08b\uff0c\u7b2c\u4e8c\u5217\uff09 5 \u6b21\u70ed\u5faa\u73af\u540e\u7684 TGO \u751f\u957f\u72b6\u51b5\u7684\u786c\u5ea6\u548c\u5f39\u6027\u6a21\u91cf mapping \u56fe\uff1b<\/span><\/p>\n

\uff08c\uff0c\u7b2c\u4e09\u5217\uff0910 \u6b21\u70ed\u5faa\u73af\u540e\u7684 TGO \u751f\u957f\u72b6\u51b5\u7684\u786c\u5ea6\u548c\u5f39\u6027\u6a21\u91cf mapping \u56fe\uff1b<\/span><\/p>\n

\u4ee5\u53ca\uff08d\uff0c\u7b2c\u56db\u5217\uff09100 \u6b21\u70ed\u5faa\u73af\u540e\u7684 TGO \u751f\u957f\u72b6\u51b5\u7684\u786c\u5ea6\u548c\u5f39\u6027\u6a21\u91cf mapping \u56fe\u3002<\/span><\/p>\n

 <\/p>\n

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\n

TGO \u751f\u957f\u5f15\u8d77\u7684\u5f39\u6027\u6a21\u91cf\u5dee\u5f02\u4f1a\u5bfc\u81f4\u5931\u914d\u5e94\u529b\u7684\u53d1\u5c55\uff0c\u8be5\u5931\u914d\u5e94\u529b\u53c8\u5bfc\u81f4\u754c\u9762\u4e4b\u4e0a\u7684\u8868\u5c42\u6d82\u5c42\u4ea7\u751f\u5fae\u88c2\u7eb9\uff0c\u5982\u4e0a\u56fe\uff08d\uff0c\u7b2c\u56db\u5217\uff09\u6240\u793a\u7684mapping\u7ed3\u679c\u6355\u6349\u5230\u4e86\u88c2\u7eb9\u533a\u57df\u7684\u786c\u5ea6\u548c\u5f39\u6027\u6a21\u91cf\u7684\u964d\u4f4e\u73b0\u8c61\u3002<\/span><\/p>\n<\/section>\n

KLA\u7684\u201cCluster\u201d\u7b97\u6cd5<\/strong>\u53ef\u4ee5\u5bf9\u4e0d\u540c\u7269\u76f8\u7684mapping\u6570\u636e\u53cd\u5377\u79ef\u5904\u7406\u5e76\u4fdd\u7559\u5b83\u7684\u7a7a\u95f4\u4fe1\u606f\uff0c\u5373\u5bf9\u76f8\u5e94\u7684\u529b\u5b66mapping\u56fe\u8fdb\u884c\u91cd\u6784\uff0c\u5982\u4e0b\u56fe\u6240\u793a\u3002\u56fe(c) \u7684Cluster\u7684\u786c\u5ea6mapping\u56fe\u6e05\u6670\u7684\u5c55\u793a\u51fa\u4e09\u7ec4\u786c\u5ea6\u660e\u663e\u4e0d\u540c\u7684\u7269\u76f8\uff1a\uff081\uff09\u03b2-NiAl\u3001\uff082\uff09\u03b3\/\u03b3\u2018-Ni \u548c\uff083\uff09\u5185\u90e8\u6c27\u5316\u4ea7\u751f\u7684\u6c27\u5316\u7269\u3002<\/span><\/p>\n

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\"\"<\/p>\n

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\u56fe 3 .\u4e94\u6b21\u70ed\u5faa\u73af\u540e\u7c98\u7ed3\u5c42\u7684\uff08a\uff09\u5fae\u7ed3\u6784\u56fe\uff0c\uff08b\uff09\u786c\u5ea6mapping\u56fe\uff08c\uff09 Cluster \u540e\u7684\u7ed3\u679c\u3002<\/span><\/p>\n

 <\/p>\n

 <\/p>\n

\u603b\u7ed3\u4e0e\u7ed3\u8bba<\/strong><\/span><\/p>\n

 <\/p>\n

KLA \u7684 NanoBlitz 3D \u5feb\u901fmapping\u6280\u672f\u53ef\u9002\u7528\u4e8e\u9694\u70ed\u6d82\u5c42\u7684\u7814\u7a76\uff1aTBC \u4e0d\u540c\u819c\u5c42\u7684\u754c\u9762\u533a\u4ee5\u53ca\u591a\u5b54\u7684\u8868\u9762\u6d82\u5c42\u7684\u7814\u7a76\uff0c\u751a\u81f3\u53ef\u4ee5\u501f\u52a9mapping\u6280\u672f\u83b7\u5f97\u7684\u5927\u91cf\u6570\u636e\u6765\u9884\u6d4b TBC \u6837\u54c1\u7684\u5269\u4f59\u5bff\u547d\u3002<\/span><\/p>\n

 <\/p>","protected":false},"excerpt":{"rendered":"

\u4ec0\u4e48\u662f\u9694\u70ed\u6d82\u5c42\uff1f   \u9694\u70ed\u6d82\u5c42\uff08TBC\uff09\u662f\u4e00\u79cd\u591a\u5c42\u591a\u7ec4\u5206\u6750\u6599,\u5982\u4e0b\u56fe\u6240\u793a\uff0c\u5e94\u7528\u4e8e\u5404\u79cd\u7ed3\u6784\u6027\u7ec4\u4ef6\u4e2d\u63d0\u4f9b […]<\/p>","protected":false},"author":1,"featured_media":2153,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[19],"tags":[],"class_list":["post-2151","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-xinwenzhongxin"],"acf":[],"_links":{"self":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts\/2151","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/comments?post=2151"}],"version-history":[{"count":1,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts\/2151\/revisions"}],"predecessor-version":[{"id":2156,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts\/2151\/revisions\/2156"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/media\/2153"}],"wp:attachment":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/media?parent=2151"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/categories?post=2151"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/tags?post=2151"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}