{"id":2158,"date":"2025-08-05T11:22:09","date_gmt":"2025-08-05T03:22:09","guid":{"rendered":"https:\/\/firstnanosystem.com\/?p=2158"},"modified":"2025-08-05T11:22:09","modified_gmt":"2025-08-05T03:22:09","slug":"lishihuimou-zonglanklakeleitanzhenshilunkuoyidechuangxinfazhanshi","status":"publish","type":"post","link":"https:\/\/firstnanosystem.com\/en\/archives\/2158","title":{"rendered":"\u5386\u53f2\u56de\u7738 | \u7eb5\u89c8KLA\u79d1\u78ca\u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eea\u7684\u521b\u65b0\u53d1\u5c55\u53f2"},"content":{"rendered":"

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KLA\u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eea\u7684\u8fc7\u53bb\uff0c\u73b0\u5728\uff0c\u4e0e\u672a\u6765\u3002<\/span><\/p>\n

KLA Instruments\u2122\u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eea\uff08\u4e5f\u79f0\u53f0\u9636\u4eea\uff09\u63d0\u4f9b\u9ad8\u7cbe\u5ea62D\u548c3D\u8868\u9762\u91cf\u6d4b\uff0c\u6d4b\u91cf\u53f0\u9636\u9ad8\u5ea6\u3001\u8868\u9762\u7c97\u7cd9\u5ea6\u3001\u7fd8\u66f2\u5ea6\u548c\u5e94\u529b\u4ee5\u53ca\u4f18\u79c0\u7684\u7a33\u5b9a\u6027\u548c\u53ef\u9760\u6027\uff0c\u6ee1\u8db3\u5ba2\u6237\u7684\u7814\u53d1\u548c\u751f\u4ea7\u8981\u6c42\u3002<\/span><\/p>\n

\u76ee\u524d\uff0cKLA Instruments\u2122 \u53f0\u9636\u4eea\u5305\u62ec\u4e13\u4e3a\u7814\u53d1\u52a9\u529b\u7684Alpha-Step\u00ae\u7cfb\u5217D-500\/D600\u684c\u9762\u5f0f\u53f0\u9636\u4eea\uff0c\u5de5\u5382\u751f\u4ea7\u7528Tencor\u00ae P-\u7cfb\u5217P-7\uff0cP-17\uff0cP-17 OF\u91cf\u4ea7\u578b\u53f0\u9636\u4eea\uff0c\u8fd8\u6709\u81ea\u52a8\u5316\u4ea7\u7ebf\u4e0a\u7684 HRP\u00ae\u7cfb\u5217P-170\u548cHRP-260\u5168\u81ea\u52a8\u53f0\u9636\u4eea\u3002<\/span><\/p>\n

\u81ea1977\u5e74KLA\u9996\u6b3e\u5546\u7528\u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eea\u95ee\u4e16\uff0c\u7ecf\u8fc7\u56db\u5341\u591a\u5e74\u7684\u4e0d\u65ad\u63a2\u7d22\u548c\u6280\u672f\u521b\u65b0\uff0cKLA\u53d6\u5f97\u4e86\u4e00\u4e2a\u53c8\u4e00\u4e2a\u7a81\u7834\uff0c\u4e0d\u65ad\u7a33\u56fa\u81ea\u8eab\u5728\u884c\u4e1a\u4e2d\u7684\u9886\u5bfc\u5730\u4f4d\u3002<\/span><\/p>\n

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\n
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1977<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
\n
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Alpha-Step\u00ae100 \u662fTencor \u63a8\u51fa\u7684\u9996\u6b3e\u53f0\u9636\u4eea\u4ea7\u54c1\u3002\u5176\u5728\u53f0\u9636\u9ad8\u5ea6\u6d4b\u91cf\u7684\u51c6\u786e\u6027\u548c\u91cd\u590d\u6027\u65b9\u9762\u8868\u73b0\u4f18\u5f02\u3002\u51ed\u501f\u4ef7\u683c\u5b9e\u60e0\u3001\u5916\u5f62\u5c0f\u5de7\u548c\u529f\u80fd\u5f3a\u5927\uff0c\u5f88\u5feb\u5c31\u6210\u4e3a\u5927\u591a\u6570\u534a\u5bfc\u4f53\u5236\u9020\u5382\u6216\u6676\u5706\u5382\u91cd\u8981\u7684\u5de5\u5177\u3002<\/span><\/p>\n

 <\/p>\n<\/section>\n<\/section>\n<\/section>\n

\"\"<\/p>\n

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 <\/p>\n

 <\/p>\n

\n
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1983<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
\n
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Alpha-Step 200 \u53d1\u5e03\uff0c\u626b\u63cf\u901f\u5ea6\u6bd4\u7ade\u54c1\u5feb 2 \u500d\uff0c\u914d\u5907 CRT \u663e\u793a\u5668\uff0c\u80fd\u591f\u81ea\u52a8\u6d4b\u91cf\u3001\u8c03\u5e73\u548c\u8ba1\u7b97\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

\n
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1987<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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Alpha-Step 250 \u95ee\u4e16\uff0c\u7075\u654f\u5ea6\u589e\u5f3a\u81f3 1 \u00c5\uff0c\u589e\u52a0\u4e86\u9694\u58f0\u5916\u58f3\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

 <\/p>\n

 <\/p>\n

\n
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 <\/p>\n

1988<\/strong><\/span><\/p>\n

Tencor P\u7cfb\u5217\u7684P-1\u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eea\u5b9e\u73b0\u4e86\u5355\u6b21\u957f\u5ea6 200mm \u626b\u63cf\uff0c\u4e14\u65e0\u9700\u4efb\u4f55\u62fc\u63a5\u3002<\/span><\/p>\n

 <\/p>\n<\/section>\n

P-1 \u8f6e\u5ed3\u4eea\u91c7\u7528\u9769 \u547d\u6027\u7684\u5168\u65b0\u8bbe\u8ba1\uff0c\u5728\u626b\u63cf\u5e73\u53f0\u3001\u5149\u5b66\u548c\u4f20\u611f\u5668\u6280\u672f\u65b9\u9762\u8fdb\u884c\u4e86\u884c\u4e1a\u521b\u65b0\uff0c\u63d0\u4f9b\u65e0\u53ef\u5339\u654c\u7684\u7a33\u5b9a\u6027\u3001\u7075\u654f\u5ea6\u548c\u91cd\u590d\u6027\u3002\u8be5\u7cfb\u7edf\u5177\u6709\u8d85\u5e73\u9762\u626b\u63cf\u5e73\u53f0\uff0c\u80fd\u591f\u5355\u6b21\u626b\u63cf\u5b9e\u73b0\u9ad8\u8fbe 200mm \u7684\u9ad8\u5206\u8fa8\u7387\uff0c\u786e\u5b9a\u8868\u9762\u7c97\u7cd9\u5ea6\u3001\u6ce2\u7eb9\u5ea6\u548c\u8584\u819c\u5e94\u529b\u7279\u5f81\u3002\u65b0\u5e73\u53f0\u4e5f\u662f 3D \u626b\u63cf\u5e73\u53f0\uff0c\u589e\u52a0\u4e86\u7b2c\u4e09\u7ef4\u5ea6\u6765\u8868\u73b0\u8868\u9762\u5f62\u8c8c\u3002\u8be5\u7cfb\u7edf\u7684\u7279\u8272\u662f\u91c7\u7528\u9876\u89c6\u5149\u5b66\u7cfb\u7edf\u6765\u63d0\u4f9b\u6e05\u6670\u7684\u6837\u54c1\u89c6\u56fe\uff0c\u4e0d\u53d7\u4f20\u7edf\u503e\u659c\u4fa7\u89c6\u7684\u626d\u66f2\u5f71\u54cd\u3002\u6b64\u5916\uff0c\u8be5\u7cfb\u7edf\u7684\u4f20\u611f\u5668\u6280\u672f\u91c7\u7528\u4e1a\u754c\u5148\u8fdb\u7684\u7ebf\u6027\u53ef\u53d8\u5dee\u5206\u7535\u5bb9\u5668 (LVDC)\uff0c\u4ece\u800c\u4f7f\u7535\u5b50\u5206\u8fa8\u7387\u8fbe\u5230\u4e9a\u57c3\u7ea7\uff0c\u5e76\u4e14\u8f6c\u52a8\u60ef\u91cf\u5c0f\uff0c\u53ef\u5b9e\u73b0\u4f4e\u4f5c\u7528\u529b\u63a7\u5236\u5e76\u964d\u4f4e\u5bf9\u566a\u58f0\u7684\u654f\u611f\u6027\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

 <\/p>\n

\"\"<\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

\n
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1991<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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Tencor P2H \u652f\u6301\u81ea\u52a8\u6676\u5706\u548c\u78c1\u76d8\u673a\u68b0\u624b\u81c2\uff0c\u00a0\u51cf\u5c11\u63a5\u89e6\u6837\u54c1\u5e26\u6765\u7684\u6c61\u67d3\u3002<\/span><\/p>\n

\u540c\u5e74\u7684Tencor P2 \u91c7\u7528\u5f00\u653e\u5f0f\u6846\u67b6\uff0c\u652f\u6301\u5c3a\u5bf8\u8fbe 430mm x 430mm \u7684\u6837\u54c1\uff0c\u540c\u65f6Tencor FP2\u53ef\u626b\u63cf\u5c3a\u5bf8\u8fbe 630mm x 630mm \u7684\u6837\u54c1\uff0c\u7528\u4e8e\u5e73\u677f\u884c\u4e1a\u3002<\/span><\/p>\n

 <\/p>\n<\/section>\n<\/section>\n

 <\/p>\n<\/section>\n

 <\/p>\n

\n
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1994<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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Tencor P-20\u00a0\u5168\u81ea\u52a8\u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eea\u53d1\u5e03\uff0c\u589e\u52a0\u4e86\u56fe\u6848\u8bc6\u522b\u548c SECS\/GEM\uff0c\u5e76\u4e14\u4e0e\u73b0\u6709\u7684\u673a\u68b0\u624b\u81c2\u76f8\u7ed3\u5408\uff0c\u5b9e\u73b0\u4e86\u5168\u81ea\u52a8\u5316\u3002<\/span><\/p>\n

Alpha-Step 500\u589e\u52a0\u5782\u76f4\u91cf\u7a0b\u81f3 1mm\uff0c\u5e76\u914d\u5907\u4e86\u5168\u65b0\u9ad8\u500d\u7387\u5149\u5b66\u5668\u4ef6\u548c\u5f69\u8272\u6444\u50cf\u5934\u3002<\/span><\/p>\n<\/section>\n

 <\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

 <\/p>\n

\n
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1996<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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Tencor P-10\u3001 P-11\u3001 P-12 \u548c P-22 \u76f8\u7ee7\u53d1\u5e03\uff0c\u4ea7\u54c1\u91c7\u7528\u6700\u65b0\u7684\u4f4e\u4f5c\u7528\u529b\u63a7\u5236\u6280\u672f\uff0c\u5ef6\u957f\u5782\u76f4\u91cf\u7a0b\u81f31000\u00b5m\u5e76\u589e\u5f3a\u73af\u5883\u9694\u79bb\u529f\u80fd\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

 <\/p>\n

Microhead II \u589e\u5f3a\u7ebf\u6027\u53ef\u53d8\u5dee\u5206\u7535\u5bb9\u5668 (LVDC)\uff0c\u5e76\u589e\u52a0\u4f4e\u81f3 0.05mg\u7684\u7a0b\u5f0f\u63a7\u5236\u4f4e\u4f5c\u7528\u529b\u3002\u5b83\u589e\u52a0\u4e86\u901a\u8fc7\u52a8\u6001\u8c03\u6574\u67a2\u8f74\u4e0a\u7684\u4f5c\u7528\u529b\uff0c\u786e\u4fdd\u5728\u4efb\u4f55\u53f0\u9636\u9ad8\u5ea6\u4e0b\uff0c\u6837\u54c1\u8868\u9762\u90fd\u80fd\u591f\u65bd\u52a0\u76f8\u540c\u7684\u529b\u3002\u6b64\u5916\uff0c\u65b0\u4f20\u611f\u5668\u53ef\u652f\u6301\u9ad8\u8fbe 1000\u00b5m \u53f0\u9636\u9ad8\u5ea6\u3002P-12 \u65b0\u589e\u9694\u58f0\u7f69\u548c\u4e3b\u52a8\u9694\u79bb\u53f0\uff0c\u4e0d\u4ec5\u589e\u5f3a\u5bf9\u73af\u5883\u566a\u58f0\u7684\u9694\u79bb\uff0c\u8fd8\u80fd\u591f\u6d4b\u91cf\u8d85\u5149\u6ed1\u786c\u76d8\u7684\u7c97\u7cd9\u5ea6\u3002P-22 \u5728\u73b0\u6709 P-20 \u673a\u68b0\u624b\u81c2\u7684\u57fa\u7840\u4e0a\u65b0\u589e\u4e00\u4e2a\u9694\u79bb\u53f0\uff0c\u5b9e\u73b0\u81ea\u52a8\u6676\u5706\u4f20\u9001\u3001\u56fe\u6848\u8bc6\u522b\u548c SECS\/GEM \u7b49\u5168\u81ea\u52a8\u6d4b\u91cf\uff0c\u4ece\u800c\u4e3a\u534a\u5bfc\u4f53\u884c\u4e1a\u63d0\u4f9b\u6574\u4f53\u89e3\u51b3\u65b9\u6848\uff0c \u63d0\u9ad8\u5176\u751f\u4ea7\u6548\u7387\u3002<\/span><\/p>\n

 <\/p>\n

\"\"<\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

\n
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1997<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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Tencor P-30 \u5c06\u5f00\u653e\u5f0f\u6676\u5706\u76d2\u673a\u68b0\u81c2\u66ff\u6362\u4e3a SMIF \u673a\u68b0\u81c2\u548c\u7cfb\u7edf\u7684\u5185\u7f6e\u5fae\u73af\u5883\uff0c \u4ee5\u652f\u6301\u534a\u5bfc\u4f53\u884c\u4e1a\u65b0\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u3002<\/span><\/p>\n

HRP-220 \u662f\u5728\u7ebf\u8868\u9762\u91cf\u6d4b\u7684\u4e00\u5927\u7a81\u7834\uff0c\u914d\u5907\u4e86 P-22 \u7684\u957f\u626b\u63cf\u5e73\u53f0\u4ee5\u53ca\u9ad8\u5206\u8fa8\u7387\u538b\u7535\u5e73\u53f0\uff0cDuraSharp\u00ae\u00a0\u63a2\u9488\u53ef\u5b9e\u73b0\u7cbe\u7ec6\u7684\u7279\u5f81\u6d4b\u91cf\u548c\u5206\u6790\u3002<\/span><\/p>\n

\u540c\u5e74\uff0cTencor Instruments \u548c KLA Instruments \u4e24\u5bb6\u516c\u53f8\u5408\u5e76\u6210\u7acb\u4e86 KLA-Tencor, Inc.\uff0c\u6210\u4e3a\u4e16\u754c\u9886\u5148\u7684\u534a\u5bfc\u4f53\u5236\u9020\u548c\u76f8\u5173\u884c\u4e1a\u7684\u826f\u7387\u7ba1\u7406\u53ca\u5de5\u827a\u63a7\u5236\u89e3\u51b3\u65b9\u6848\u4f9b\u5e94\u5546\u4e4b\u4e00\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

\n
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1998<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
\n
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HRP-320 \u5728HRP-220 \u7684\u6d4b\u91cf\u80fd\u529b\u57fa\u7840\u4e0a\u6269\u5c55\u5230 300mm \u6676\u5706\uff0c\u662f\u80fd\u591f\u5355\u6b21\u626b\u63cf\u6d4b\u91cf 300mm \u6676\u5706\u5168\u76f4\u5f84\u7684\u7cfb\u7edf\u3002<\/span><\/p>\n<\/section>\n<\/section>\n

 <\/p>\n<\/section>\n

 <\/p>\n

 <\/p>\n

\n
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1999<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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HRP-240 \u548c HRP-340 \u5728\u4f7f\u7528\u7684\u4fbf\u5229\u6027\u3001\u4ea7\u51fa\u548c\u7cbe\u5ea6\u4e0a\u6709\u4e86\u91cd\u5927\u6539\u8fdb\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

 <\/p>\n

\u65b0\u589e\u538b\u7535\u6320\u6027\u5e73\u53f0\u8bbe\u8ba1\uff0c\u4ee5\u5c3d\u91cf\u51cf\u5c11\u5e73\u9762\u5916\u7684\u8fd0\u52a8\uff0c\u626b\u63cf\u5e73\u9762\u5ea6 >2x \u5728\u4fdd\u6301 90\u00b5m x 90\u00b5m \u626b\u63cf\u533a\u57df\u548c 1nm \u5206\u8fa8\u7387\u7684\u540c\u65f6\uff0c\u6bd4\u4ee5\u524d\u7684\u8bbe\u8ba1\u6709\u4e86\u5f88\u5927\u7684\u8fdb\u6b65\u3002\u8be5\u7cfb\u7edf\u589e\u52a0\u5728\u7ebf\u9ad8\u500d\u548c\u4f4e\u500d\u5149\u5b66\u5668\u4ef6\uff0c\u5e76\u5229\u7528\u8ddd\u79bb\u4f20\u611f\u5668\u5b9e\u73b0\u65e0\u63a5\u89e6\u81ea\u52a8\u805a\u7126\uff0c\u4ece\u800c\u53ef\u5141\u8bb8\u5feb\u901f\u3001\u7cbe\u786e\u5bf9\u7126\uff0c\u5e76\u901a\u8fc7\u51cf\u5c11\u63a2\u9488\u7684\u8868\u9762\u63a5\u89e6\u6b21\u6570\u6765\u5ef6\u957f\u5176\u4f7f\u7528\u5bff\u547d\u3002\u957f\u626b\u63cf\u5e73\u53f0\u901a\u8fc7\u589e\u52a0\u7ebf\u6027\u7f16\u7801\u5668\u6765\u63d0\u9ad8\u6837\u54c1\u5b9a\u4f4d\u7684\u51c6\u786e\u6027\uff0c\u800c\u66f4\u7ec6\u87ba\u8ddd\u7684\u4e1d\u6760\u53ef\u5b9e\u73b0\u66f4\u9ad8\u7684\u5206\u8fa8\u7387\u3002\u901a\u8fc7\u589e\u52a0\u6570\u5b57\u4fe1\u53f7\u5904\u7406\u5668\u6765\u7ba1\u7406\u6240\u6709\u5e73\u53f0\u63a7\u5236\uff0c\u5c06\u8ba1\u7b97\u673a\u5904\u7406\u80fd\u529b\u7559\u7ed9\u7528\u6237\u63a5\u53e3\uff0c\u4ece\u800c\u6539\u5584\u7cfb\u7edf\u7684\u6574\u4f53\u6027\u80fd\u3002\u65b0\u589e\u6d78\u6e0d\u6a21\u5f0f\uff08Dipping Mode\u2122 \uff09\u80fd\u591f\u6d4b\u91cf\u9ad8\u6df1\u5bbd\u6bd4\u7684\u8680\u523b\u6df1\u5ea6\u7279\u5f81\u3002<\/span><\/p>\n

 <\/p>\n

\"\"<\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

\n
\n
\n
\n

2001<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
\n
\n
\n

Tencor P-15 \u7ed3\u5408\u4e86 P-10 \u548c P-11 \u7cfb\u7edf\u7684\u529f\u80fd\uff0c\u6280\u672f\u66f4\u52a0\u6210\u719f\uff0c\u4e3a\u5355\u4e00\u5e73\u53f0\u4e0a\u7684\u7814\u53d1\u548c\u751f\u4ea7\u63d0\u4f9b\u652f\u6301\u3002<\/span><\/p>\n

 <\/p>\n<\/section>\n<\/section>\n

\u00a0<\/p>\n<\/section>\n

\n
\n
\n
\n

2003<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
\n
\n
\n

Alpha-Step IQ \u5728 Alpha-Step 500 \u57fa\u7840\u4e0a\u65b0\u589e USB \u7535\u5b50\u5668\u4ef6\u548c\u5168\u65b0\u8bbe\u8ba1\u7684\u8f6f\u4ef6\uff0c\u53ef\u4ee5\u663e\u8457\u63d0\u4f9b\u589e\u5f3a\u7684\u626b\u63cf\u6392\u5e8f\u548c\u6570\u636e\u5206\u6790\u80fd\u529b\u3002<\/span><\/p>\n

 <\/p>\n<\/section>\n<\/section>\n<\/section>\n

 <\/p>\n

 <\/p>\n

\n
\n
\n
\n

2007<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
\n
\n
\n

Tencor P-16+ \u5728-15 \u7684\u57fa\u7840\u4e0a\u8fdb\u884c\u4e86\u6539\u8fdb\uff1a\u65b0\u7684 USB \u7535\u5b50\u5668\u4ef6\u3001\u66f4\u5f3a\u5927\u7684\u8f6f\u4ef6\u4ee5\u53ca Apex \u9ad8\u7ea7\u6570\u636e\u5206\u6790\u548c\u62a5\u544a\u64b0\u5199\u8f6f\u4ef6\u529f\u80fd\u3002<\/span><\/p>\n

 <\/p>\n<\/section>\n

 <\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\n
\n
\n

2008<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
\n
\n
\n

Tencor P-6 \u662f\u4e00\u53f0\u9ad8\u6027\u80fd\u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eea\uff0c\u5728\u8f83\u5c0f\u7684\u5e73\u53f0\u4e0a\u6cbf\u7528\u4e86 P-16+ LVDC \u4f20\u611f\u5668\u6280\u672f\u548c\u626b\u63cf\u5e73\u53f0\u6280\u672f\u3002<\/span><\/p>\n

HRP-250 \u548c HRP-350 \u4eea\u5668\u91c7\u7528\u566a\u97f3\u66f4\u4f4e\u7684 LVDC \u4f20\u611f\u5668\u6280\u672f\u3001\u65b0\u7684\u9694\u79bb\u7cfb\u7edf\uff08\u4ec5 HRP-350\uff09\u548c\u7b2c\u4e8c\u4ee3 DuraSharp II \u63a2\u9488\u3002\u53ef\u5b9e\u73b0\u66f4\u5c0f\u7279\u5f81\u7684\u6d4b\u91cf\u548c\u63a5\u8fd1 2 \u500d\u7684\u541e\u5410\u91cf\u3002<\/span><\/p>\n

 <\/p>\n

 <\/p>\n<\/section>\n<\/section>\n<\/section>\n

\n
\n
\n
\n

2009<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
\n
\n
\n

Ambios Technology \u52a0\u5165KLA-Tencor\u5e76\u53d1\u5e03 XP100 \u548c XP200\uff0c\u91c7\u7528\u5149\u5b66\u6760\u6746\u4f20\u611f\u5668\u6280\u672f\uff0c\u5782\u76f4\u91cf\u7a0b1200\u00b5m \u5e76\u652f\u6301200mm\u6676\u5706\u6837\u54c1\u3002<\/span><\/p>\n

 <\/p>\n<\/section>\n

 <\/p>\n<\/section>\n<\/section>\n

\n
\n
\n
\n

2010<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
\n
\n
\n

KLA-Tencor \u53d1\u5e03\u4e86\u57fa\u4e8e Ambios Technology \u5e73\u53f0\u7684 Alpha-Step D-100 \u548c D-120\uff0c\u91c7\u7528\u589e\u5f3a\u5149\u5b66\u6760\u6746\u4f20\u611f\u5668\u6280\u672f\uff0c\u00a0\u663e\u8457\u6539\u5584\u4e86\u6d4b\u91cf\u7684\u7a33\u5b9a\u6027\u3002<\/span><\/p>\n

 <\/p>\n

 <\/p>\n<\/section>\n<\/section>\n<\/section>\n

\n
\n
\n
\n

2013<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
\n
\n
\n

Tencor P-7 \u548c P-17 \u914d\u5907\u4e86\u65b0\u9ad8\u5206\u8fa8\u7387\u5f69\u8272\u76f8\u673a\uff0c\u5e76\u589e\u5f3a\u4e86\u5bf9\u7fd8\u66f2\u5ea6\u548c\u5e94\u529b\u7684\u6d4b\u91cf\u3002<\/span><\/p>\n

 <\/p>\n<\/section>\n

\"\"<\/p>\n

 <\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

\n
\n
\n
\n
\n
\n

2014<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n

\n
\n
\n

Alpha-Step D-500 \u548c D-600 \u4eea\u5668\u91c7\u7528\u4e86\u4e0e P\u7cfb\u5217\u76f8\u540c\u7684\u9ad8\u5206\u8fa8\u7387\u76f8\u673a\u3002\u589e\u52a0\u4e86\u4fa7\u89c6\u56fe\u7684\u68af\u5f62\u6821\u6b63\u529f\u80fd\uff0c\u5e76\u4e14\u8fdb\u4e00\u6b65\u6539\u5584\u4e86\u6d4b\u91cf\u7684\u91cd\u590d\u6027\u3002<\/span><\/p>\n

 <\/p>\n<\/section>\n

\"\"<\/p>\n

 <\/p>\n<\/section>\n<\/section>\n

 <\/p>\n

 <\/p>\n<\/section>\n

\n
\n
\n
\n

2016<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n

\n
\n
\n

Tencor P-170\u7ed3\u5408\u4e86 P-17 \u4e0e HRP \u673a\u68b0\u624b\u81c2\uff0c\u662f\u4e00\u6b3e\u65b0\u7684\u5168\u81ea\u52a8\u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eea\u3002<\/span><\/p>\n

\u540c\u5e74\uff0cHRP\u7cfb\u5217\u7684\u65b0\u673a\u578bHRP-260 \u4e5f\u968f\u540e\u53d1\u5e03\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n

 <\/p>\n

\u65b0\u4eea\u5668\u5728\u81ea\u52a8\u5316\u6676\u5706\u5904\u7406\u65b9\u9762\u6709\u4e86\u91cd\u5927\u7684\u6539\u8fdb\u3002\u589e\u52a0\u4e86\u51e0\u4f55\u56fe\u6848\u8bc6\u522b\uff0c\u63d0\u9ad8\u4e86\u503e\u659c\u6821\u6b63\u7b97\u6cd5\u7684\u51c6\u786e\u6027\uff0c\u5e76\u91c7\u7528\u65b0\u65b9\u6cd5\u8fdb\u884c\u81ea\u52a8\u706f\u5149\u63a7\u5236\u3002\u673a\u68b0\u624b\u81c2\u5305\u542b\u65b0\u7535\u5b50\u5668\u4ef6\uff0c\u53ef\u652f\u6301\u78b3\u5316\u7845 (SiC) \u548c\u84dd\u5b9d\u77f3\u7b49\u900f\u660e\u6837\u54c1\u4ee5\u53ca\u7845\u3001\u7837\u5316\u9553 (GaAs) \u548c AlTiC \u7b49\u4e0d\u900f\u660e\u6837\u54c1\u7684\u9884\u5bf9\u51c6\u3002\u4e5f\u652f\u6301\u5361\u76d2\u5185wafer\u63a2\u6d4b\u548c\u8bfb\u53d6wafer ID.<\/span><\/p>\n

 <\/p>\n

\"\"<\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

\n
\n
\n
\n

2019<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
\n
\n
\n

KLA Instruments\u2122 \u5168\u7cfb\u5217\u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eeaAlpha-Step\u00ae\u3001Tencor\u00ae P- \u548c HRP\u00ae\uff0c\u79fb\u690d\u8f6f\u4ef6\u5e73\u53f0\u81f3\u6700\u65b0\u7684Windows 10 OS\u3002\u540c\u65f6\uff0c\u65b0\u7684\u6d4b\u91cf\u548c\u6570\u636e\u5206\u6790\u529f\u80fd\u53d1\u5e03\u5728\u65b0\u7684\u8f6f\u4ef6\u5e73\u53f0\u4e2d\u3002<\/span><\/p>\n

 <\/p>\n

 <\/p>\n<\/section>\n

 <\/p>\n<\/section>\n<\/section>\n

\n
\n
\n
\n

2023<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
\n
\n
\n

KLA\u5c06\u7ee7\u7eed\u63a2\u7d22\u7684\u811a\u6b65\uff0c\u800c\u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eea\u5168\u7ebf\u4ea7\u54c1\u4e5f\u5c06\u6301\u7eed\u53d1\u5c55\uff0c\u4e3a\u6ee1\u8db3\u5ba2\u6237\u7684\u9700\u6c42\u4e0d\u65ad\u52aa\u529b\u521b\u65b0\u3002<\/span><\/p>\n

Keep Looking Ahead\uff01<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

 <\/p>\n

 <\/p>","protected":false},"excerpt":{"rendered":"

    KLA\u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eea\u7684\u8fc7\u53bb\uff0c\u73b0\u5728\uff0c\u4e0e\u672a\u6765\u3002 KLA Instruments\u2122\u63a2\u9488\u5f0f\u8f6e […]<\/p>","protected":false},"author":1,"featured_media":2159,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[19],"tags":[],"class_list":["post-2158","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-xinwenzhongxin"],"acf":[],"_links":{"self":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts\/2158","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/comments?post=2158"}],"version-history":[{"count":1,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts\/2158\/revisions"}],"predecessor-version":[{"id":2166,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts\/2158\/revisions\/2166"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/media\/2159"}],"wp:attachment":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/media?parent=2158"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/categories?post=2158"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/tags?post=2158"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}