{"id":2174,"date":"2025-08-05T13:03:02","date_gmt":"2025-08-05T05:03:02","guid":{"rendered":"https:\/\/firstnanosystem.com\/?p=2174"},"modified":"2025-08-05T13:03:02","modified_gmt":"2025-08-05T05:03:02","slug":"lishihuimou-zonglanklaguangxuelunkuoyidechuangxinfazhanshi","status":"publish","type":"post","link":"https:\/\/firstnanosystem.com\/en\/archives\/2174","title":{"rendered":"\u5386\u53f2\u56de\u7738 | \u7eb5\u89c8KLA\u5149\u5b66\u8f6e\u5ed3\u4eea\u7684\u521b\u65b0\u53d1\u5c55\u53f2"},"content":{"rendered":"
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KLA Instruments\u62e5\u6709\u5982\u4eca\u7684\u5149\u5b66\u8f6e\u5ed3\u4eea\u7ec4\u5408\uff0c\u662f\u65e9\u5148\u5404\u54c1\u724c\u5408\u529b\u521b\u65b0\u7684\u7ed3\u679c\uff1a<\/span><\/p>\n

1.ADE \u53d1\u5e03\u4e86 MicroXAM \u767d\u5149\u5e72\u6d89\u4eea\u3002<\/span><\/p>\n

2.Zeta\u2122 Instruments \u5f00\u53d1\u4e86 ZDot\u2122\u548c\u591a\u6a21\u5f0f\u5149\u5b66\u8f6e\u5ed3\u4eea\u3002<\/span><\/p>\n

3.KLA\u65d7\u4e0bFilmetrics\u00ae\u63a8\u51fa\u4e86\u65b0\u578b\u3001\u901a\u7528\u7684\u767d\u5149\u5e72\u6d89\u4eea\u3002<\/span><\/p>\n

 <\/p>\n

KLA Instruments \u54c1\u724c\u4e0b\u591a\u6837\u5316\u7684\u5149\u5b66\u8f6e\u5ed3\u4eea\u4ea7\u54c1\u90fd\u62e5\u6709\u5404\u81ea\u60a0\u4e45\u7684\u521b\u65b0\u5386\u53f2\u3002<\/span><\/p>\n<\/section>\n

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1999<\/strong><\/span><\/p>\n

ADE Phase Shift \u63a8\u51fa\u4e86 MicroXAM \u5149\u5b66\u8f6e\u5ed3\u4eea\uff0c\u5177\u6709\u57c3\u7c73\u7ea7\u7075\u654f\u5ea6\uff0c\u53ef\u7528\u4e8e\u8d85\u5149\u6ed1\u8868\u9762\u7684\u76f8\u79fb\u5e72\u6d89\u6d4b\u91cf\uff0c\u4ee5\u53ca\u66f4\u5927\u53f0\u9636\u9ad8\u5ea6\u6837\u54c1\u7684\u5782\u76f4\u626b\u63cf\u5e72\u6d89\u6d4b\u91cf\u3002<\/span><\/p>\n

 <\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n

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2006<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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KLA \u6536\u8d2d\u4e86 ADE \u516c\u53f8\uff0c\u4e3a KLA \u7684\u684c\u9762\u5f0f\u91cf\u6d4b\u7ec4\u5408\u589e\u52a0\u4e86 MicroXAM-100 \u5149\u5b66\u8f6e\u5ed3\u4eea\uff0c\u5e76\u63a8\u51fa\u4e86\u9762\u5411\u534a\u5bfc\u4f53\u5e02\u573a\u7684\u886c\u5e95\u51e0\u4f55\u5f62\u8c8c\u548c\u7f3a\u9677\u68c0\u6d4b\u89e3\u51b3\u65b9\u6848\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

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2010<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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Zeta-20 \u662f Zeta Instruments \u63a8\u51fa\u7684\u7b2c\u4e00\u6b3e\u4ea7\u54c1\u3002<\/span><\/p>\n

 <\/p>\n

Zeta-20 \u662f\u4f7f\u7528\u00a0ZDot\u2122\u4e13\u5229\u6280\u672f<\/strong>\u7684\u5149\u5b66\u8f6e\u5ed3\u4eea\uff0c\u5b83\u7ed3\u5408\u4e86\u7ed3\u6784\u7167\u660e\u3001\u5171\u805a\u7126\u5149\u5b66\u4ee5\u751f\u6210\u9ad8\u5206\u8fa8\u7387\u76843D\u8868\u9762\u5f62\u8c8c\u6570\u636e\u548c\u8868\u9762\u771f\u5f69\u56fe\u50cf\u3002\u8be5\u6280\u672f\u4f7f\u7528\u6237\u80fd\u591f\u8f7b\u677e\u5730\u805a\u7126\u5728\u4efb\u4f55\u900f\u660e\u6216\u4e0d\u900f\u660e\u7684\u8868\u9762\u4e0a\uff0c\u4ece\u800c\u5b9e\u73b0\u5bf9\u53f0\u9636\u9ad8\u5ea6\u548c\u7c97\u7cd9\u5ea6\u7684\u5feb\u901f\u6d4b\u91cf<\/strong>\u3002\u591a\u6a21\u7ec4\u5149\u5b66\u7cfb\u7edf\u5c06 ZDot \u6280\u672f\u4e0e\u767d\u5149\u5e72\u6d89\u4eea\u3001\u526a\u5207\u5e72\u6d89\u4eea\u3001\u900f\u660e\u8584\u819c\u53cd\u5c04\u5149\u8c31\u4eea\u548c\u81ea\u52a8\u7f3a\u9677\u68c0\u6d4b\u529f\u80fd\u76f8\u7ed3\u5408\uff0c\u6269\u5c55\u4e86\u975e\u63a5\u89e6\u5f0f3D \u5149\u5b66\u8f6e\u5ed3\u4eea\u7684\u5e94\u7528\u573a\u666f\u3002<\/span><\/p>\n<\/section>\n<\/section>\n

 <\/p>\n<\/section>\n

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\u540c\u5e74\uff0cZeta-200 \u53d1\u5e03\uff0c\u5e26\u6709\u81ea\u52a8\u5316\u8f7d\u53f0\uff0c\u5e76\u63a8\u51fa\u4e86\u53d1\u5149\u4e8c\u6781\u7ba1\u00a0(LED) \u5e94\u7528\u7684\u89e3\u51b3\u65b9\u6848\u3002<\/span><\/p>\n

Zeta-200 \u5149\u5b66\u8f6e\u5ed3\u4eea\u5229\u7528\u9ad8\u900f\u5c04\u5149\u5b66\u8bbe\u8ba1\u3001\u80cc\u5149\u6e90\u7167\u660e\u6280\u672f\u548c\u4e13\u6709\u7b97\u6cd5\u6765\u6d4b\u91cf\u56fe\u5f62\u5316\u7684\u84dd\u5b9d\u77f3\u886c\u5e95\u00a0(PSS)\u3002\u00a0\u8be5\u7cfb\u7edf\u53ef\u4ee5\u9002\u5e94\u5404\u79cd\u5f62\u72b6\u7684\u00a0PSS \u51f8\u8d77<\/strong>\uff0c\u6d4b\u91cf\u89c6\u573a\u4e2d\u6240\u6709 PSS \u51f8\u8d77\u7684\u9ad8\u5ea6\u548c\u95f4\u8ddd\uff0c\u4ece\u800c\u907f\u514d\u4ec5\u6d4b\u91cf\u4e00\u5c0f\u90e8\u5206\u533a\u57df\u800c\u4ea7\u751f\u9519\u8bef\u7684\u51f8\u8d77\u4fe1\u53f7\u6216\u5bfc\u81f4\u7684\u7ed3\u679c\u504f\u5dee\u3002\u901a\u8fc7\u591a\u6a21\u5f0f\u5149\u5b66\u7cfb\u7edf<\/strong>\uff0c\u8fd8\u53ef\u4ee5\u6d4b\u91cf\u5728 PSS \u5236\u9020\u8fc7\u7a0b\u4e2d\u8584\u819c\u539a\u5ea6\u7684\u53d8\u5316\u4ee5\u53ca\u6837\u54c1\u7684\u7fd8\u66f2\u5ea6\u3002\u6700\u540e\uff0c\u901a\u8fc7\u81ea\u52a8\u7f3a\u9677\u68c0\u6d4b\u529f\u80fd<\/strong>\uff0cZeta-200 \u53ef\u4ee5\u8bc6\u522b\u4e0d\u540c\u7f3a\u9677\u7684\u79cd\u7c7b\uff0c\u5982\u5265\u843d\u7684\u51f8\u5757\u3001\u5212\u75d5\u548c\u9897\u7c92\u3002<\/span><\/p>\n

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2011<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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Zeta-280 \u5728 Zeta-200 \u5e73\u53f0\u7684\u57fa\u7840\u4e0a\u589e\u52a0\u4e86\u4e00\u4e2a\u9002\u914d\u5355\u4e2a\u6676\u5706\u76d2\u7684\u684c\u9762\u5f0f\u673a\u68b0\u624b\u81c2\u3002<\/span><\/p>\n

Zeta-300 \u5149\u5b66\u8f6e\u5ed3\u4eea\u652f\u6301\u6d4b\u91cf\u6700\u59278\u5bf8\u7684\u5668\u4ef6\u3002\u8be5\u7cfb\u7edf\u91c7\u7528\u4e00\u4f53\u5316\u4e3b\u52a8\u6216\u88ab\u52a8\u9694\u632f\u5e73\u53f0\uff0c\u5e76\u642d\u914d\u9694\u58f0\u7f69\u9694\u79bb\u73af\u5883\u4e2d\u7684\u566a\u58f0\u3002<\/span><\/p>\n<\/section>\n<\/section>\n

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2012<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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Zeta-20 \u91c7\u7528 ZDot\u6280\u672f\uff0c\u4e3a\u5c01\u88c5\u5fae\u6d41\u4f53\u5668\u4ef6\u7b49\u900f\u660e\u591a\u8868\u9762\u5e94\u7528\u573a\u666f\u63d0\u4f9b\u4e86\u4e00\u79cd\u521b\u65b0\u7684\u6d4b\u91cf\u89e3\u51b3\u65b9\u6848\u3002\u5fae\u6d41\u4f53\u5668\u4ef6\u7684\u5c01\u88c5\u5de5\u827a\u901a\u5e38\u4f1a\u6539\u53d8\u901a\u9053\u7684\u5c3a\u5bf8\u548c\u5916\u5f62\uff0c\u4ece\u800c\u5f71\u54cd\u5668\u4ef6\u7684\u6027\u80fd\u3002\u56e0\u6b64\uff0c\u5c01\u88c5\u540e\u7684\u6d4b\u91cf\u5bf9\u5ba2\u6237\u7684\u4ea7\u54c1\u63a7\u5236\u81f3\u5173\u91cd\u8981\u3002Zeta-20\u9ad8\u900f\u5c04\u7387\u7684\u5149\u5b66\u8bbe\u8ba1\u4f7f\u5f97ZDot \u4fe1\u53f7\u5728\u7ecf\u8fc7\u591a\u819c\u5c42\u900f\u5c04\u540e\u4ecd\u80fd\u4fdd\u6301\u8db3\u591f\u5f3a\u5ea6\uff0c\u4ece\u800c\u53ef\u4ee5\u5b9e\u73b0\u5bf9\u5fae\u6d41\u4f53\u5668\u4ef6\u73bb\u7483\u76d6\u677f\u5c01\u88c5\u524d\u540e\u5173\u952e\u5c3a\u5bf8\u53c2\u6570\u7684\u6d4b\u91cf\uff0c\u4f8b\u5982\u76d6\u677f\u7684\u539a\u5ea6\u3001\u5fae\u6d41\u4f53\u901a\u9053\u7684\u6df1\u5ea6\u548c\u5c3a\u5bf8\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

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\u540c\u5e74\uff0c\u5c06 Zeta-280\u7684\u684c\u9762\u5f0f\u673a\u68b0\u624b\u81c2\u4e0e Zeta-300 \u5e73\u53f0\u76f8\u7ed3\u5408\uff0c\u63a8\u51fa\u4e86Zeta-380\u81ea\u52a8\u5316\u6d4b\u91cf\u8bbe\u5907\u3002<\/span><\/p>\n

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2014<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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MicroXAM-800\u00a0\u96c6\u6210\u4e86Ambios \u548c ADE \u76f8\u79fb\u5e72\u6d89\u6d4b\u91cf\u6280\u672f\u7684\u6700\u4f73\u786c\u4ef6\u548c\u7b97\u6cd5\uff0c\u5e76\u642d\u914d\u521b\u65b0\u4e14\u6613\u7528\u7684\u8f6f\u4ef6\uff0c\u7528\u4e8e\u53f0\u9636\u9ad8\u5ea6\u548c\u7c97\u7cd9\u5ea6\u7684\u81ea\u52a8\u6d4b\u91cf\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

\u00a0<\/p>\n

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2015<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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\u57fa\u4e8eZeta-20\u63a8\u51fa\u592a\u9633\u80fd\u884c\u4e1a\u521b\u65b0\u89e3\u51b3\u65b9\u6848<\/strong>\uff0c\u7528\u4e8e\u7ed2\u9762\u548c\u4e1d\u7f51\u5370\u5237\u7684\u5de5\u827a\u63a7\u5236\u3002<\/strong>\u592a\u9633\u80fd\u5149\u4f0f\u7684\u6210\u672c\u63a7\u5236\u548c\u63d0\u5347\u8f6c\u5316\u7387\uff0c\u63a8\u52a8\u7740\u6676\u7845\u5149\u4f0f\u7684\u6280\u672f\u8fed\u4ee3\u3002\u91d1\u5b57\u5854\u7ed2\u9762\u7684\u89c4\u683c\u548c\u8868\u9762\u6805\u7ebf\u5370\u5237\u7684\u8d28\u91cf\uff0c\u5bf9\u6676\u7845\u5149\u4f0f\u7684\u8f6c\u5316\u6548\u7387\u4ea7\u751f\u91cd\u8981\u5f71\u54cd\uff0c\u56e0\u6b64\u6210\u4e3a\u4ea7\u54c1\u63a7\u5236\u7684\u5173\u952e\u73af\u8282\u3002<\/span><\/p>\n

\u7ed2\u9762\u5de5\u827a\u63a7\u5236\u5bf9\u4e8e\u63a7\u5236\u7ed2\u9762\u91d1\u5b57\u5854\u7ed3\u6784\u7684\u9ad8\u5ea6\u3001\u5916\u5f62\u548c\u5c3a\u5bf8\u5206\u5e03\u81f3\u5173\u91cd\u8981\uff0c\u56e0\u4e3a\u8fd9\u4f1a\u5f71\u54cd\u592a\u9633\u80fd\u7535\u6c60\u7684\u5149\u6355\u83b7\u6548\u7387\u3002Zeta-20\u63d0\u4f9b\u4e86\u4e13\u4e3a\u7ed2\u9762\u91d1\u5b57\u5854\u6d4b\u91cf\u7684\u89e3\u51b3\u65b9\u6848\uff0c\u53ef\u5b9e\u73b0\u91d1\u5b57\u5854\u7ed3\u6784\u7684\u81ea\u52a8\u63a2\u6d4b\u548c\u7edf\u8ba1\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

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\u91d1\u5c5e\u6805\u7ebf\u91c7\u7528\u4e1d\u7f51\u5370\u5237\u5de5\u827a\uff0c\u8be5\u5de5\u827a\u4f1a\u5e26\u6765\u91d1\u5c5e\u6805\u7ebf\u7684\u5bbd\u5ea6\u3001\u9ad8\u5ea6\u3001\u4f53\u79ef\u3001\u7535\u5b66\u7279\u6027\u7b49\u65b9\u9762\u7684\u53d8\u5316\uff0c\u4ece\u800c\u589e\u52a0\u5668\u4ef6\u7684\u5236\u9020\u6210\u672c\u3002Zeta-20\u7684\u9ad8\u52a8\u6001\u8303\u56f4\u6d4b\u91cf\u6a21\u5f0f\uff08HDR\uff09\u4e3a\u91d1\u5c5e\u6805\u7ebf\u5de5\u827a\u63d0\u4f9b\u4e86\u6d4b\u91cf\u89e3\u51b3\u65b9\u6848\uff0c\u53ef\u5b9e\u73b0\u5bf9\u53cd\u5c04\u7387\u5dee\u5f02\u8f83\u5927\u7684\u6750\u6599\u6d4b\u91cf\u3002<\/strong>\u5728\u592a\u9633\u80fd\u7535\u6c60\u5236\u9020\u5de5\u827a\u8fc7\u7a0b\u4e2d\uff0cHDR\u6a21\u5f0f\u88ab\u7528\u4e8e\u6d4b\u91cf\u9540\u6709\u51cf\u53cd\u819c\u6d82\u5c42\u7ed2\u9762\u8868\u9762\u7684\u91d1\u5c5e\u6805\u7ebf3D\u5f62\u8c8c\u3002<\/span><\/p>\n

 <\/p>\n

\"\"<\/p>\n

 <\/p>\n

\u540c\u5e74\uff0c\u63a8\u51fa\u4e86Zeta-360 \u548c\u7b2c\u4e00\u4ee3\u00a0Zeta-388 \u4ea7\u54c1\uff0c\u63d0\u4f9b\u4e86\u57fa\u4e8eZeta\u5e73\u53f0\u7684\u6676\u5706\u81ea\u52a8\u5316\u5904\u7406\u89e3\u51b3\u65b9\u6848<\/strong>\u3002<\/span><\/p>\n

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2016<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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Profilm3D \u662f\u4e00\u6b3e\u57fa\u4e8e\u767d\u5149\u5e72\u6d89\u539f\u7406\u7684\u5149\u5b66\u8f6e\u5ed3\u4eea\uff0c\u53ef\u4ee5\u9002\u7528\u4e8e\u591a\u79cd\u5e94\u7528\u573a\u666f\uff0c\u5305\u62ec\u8584\u819c\u539a\u5ea6\u3001\u8868\u9762\u7c97\u7cd9\u5ea6\u3001\u53f0\u9636\u9ad8\u5ea6\u7b49\u8868\u9762\u5f62\u8c8c\u6d4b\u91cf\uff0c\u662f\u4e00\u79cd\u9ad8\u6027\u4ef7\u6bd4\u7684\u4e09\u7ef4\u8868\u9762\u5f62\u8c8c\u6d4b\u91cf\u89e3\u51b3\u65b9\u6848\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

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2017<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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Zeta Instruments \u52a0\u5165KLA Instruments \u96c6\u56e2\uff0c\u4e3aKLA\u5149\u5b66\u8f6e\u5ed3\u4eea\u5f15\u5165 ZDot \u6280\u672f\u548c\u591a\u6a21\u5f0f\u6d4b\u91cf\u6280\u672f\uff0c\u6269\u5145KLA\u5149\u5b66\u8f6e\u5ed3\u4eea\u7684\u4ea7\u54c1\u7ebf\u3002Zeta\u7cfb\u5217\u7528\u4e8e3D\u8868\u9762\u5f62\u8c8c\u6d4b\u91cf\uff0c\u652f\u6301\u7814\u53d1\u3001\u751f\u4ea7\u548c\u5168\u81ea\u52a8\u5316\u73af\u5883\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

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2018<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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KLA\u65d7\u4e0bFilmetrics \u63a8\u51fa\u4e86\u4e16\u754c\u4e0a\u9996\u4e2a\u4e13\u95e8\u7528\u4e8e3D\u5f62\u8c8c\u6570\u636e\u5904\u7406\u7684\u7f51\u7edc\u5e94\u7528\u7a0b\u5e8fProfilmOnline\u00ae\u00a0\uff0c\u5229\u7528\u7f51\u7edc\u6d4f\u89c8\u5668\u548c\u5f3a\u5927\u7684\u667a\u80fd\u624b\u673a\u529f\u80fd\uff0c\u4f7f\u7528\u6237\u65e0\u9700\u7535\u8111\u5373\u53ef\u5206\u6790\u3001\u5b58\u50a8\u548c\u5171\u4eab3D\u6570\u636e\uff0c\u5305\u62ec\u5149\u5b66\u8f6e\u5ed3\u4eea\u3001\u626b\u63cf\u63a2\u9488\u663e\u5fae\u955c\uff08\u5982\u539f\u5b50\u529b\u663e\u5fae\u955c\uff09\u548c\u5176\u4ed6\u4e09\u7ef4\u6210\u50cf\u663e\u5fae\u955c\u7b49\u83b7\u53d6\u7684\u4e09\u7ef4\u5f62\u8c8c\u6570\u636e\u3002\u7528\u6237\u53ef\u4ee5\u4fbf\u6377\u5730\u4ece Filmetrics Profilm3D \u5149\u5b66\u8f6e\u5ed3\u4eea\u4e0a\u4f20\u6570\u636e\uff0c\u5bf9\u5176\u8fdb\u884c\u5206\u6790\uff0c\u5e76\u4e0e\u540c\u4e8b\u5171\u4eab\u6d4b\u91cf\u7ed3\u679c\u3002ProfilmOnline\u00ae\u5141\u8bb8\u7528\u6237\u901a\u8fc7\u8de8\u5e73\u53f0\u7684\u4efb\u610f\u8bbe\u5907\uff0c\u968f\u65f6\u968f\u5730\u8bbf\u95ee\u6570\u636e\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

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\"\"<\/p>\n

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Profilm3D \u589e\u52a0\u4e86 TotalFocus\u2122\u529f\u80fd\uff0c\u63d0\u4f9b\u5176\u6837\u54c1\u8868\u9762\u76843D\u81ea\u7136\u5f69\u8272\u56fe\u50cf\u3002<\/span><\/p>\n

\u65b0\u4e00\u4ee3Zeta-388\u5149\u5b66\u8f6e\u5ed3\u4eea\u662f\u975e\u63a5\u89e6\u5f0f\u4e09\u7ef4\u8868\u9762\u5f62\u8c8c\u6d4b\u91cf\u7cfb\u7edf\u3002\u8be5\u7cfb\u7edf\u5728Zeta-300\u7684\u57fa\u7840\u4e0a\uff0c\u66f4\u65b0\u4e86\u7528\u4e8e\u5168\u81ea\u52a8\u6d4b\u91cf\u7684\u673a\u68b0\u624b\u81c2\u64cd\u4f5c\u7cfb\u7edf<\/strong>\u3002<\/span><\/p>\n

Zeta-388\u652f\u6301OCR\u548cSECS\/GEM\uff0c\u4ece\u800c\u53ef\u7528\u4e8e\u5168\u81ea\u52a8\u4ea7\u7ebf\u7684\u751f\u4ea7\u5236\u9020<\/strong>\u3002\u8be5\u7cfb\u7edf\u63d0\u4f9b\u4e86\u5177\u6709\u751f\u4ea7\u4ef7\u503c\u7684\u5de5\u827a\u63a7\u5236\u6d4b\u91cf\uff0c\u5982PSS\u4e0a\u7684\u51f8\u5757\u9ad8\u5ea6\u3001\u7c97\u7cd9\u5ea6\u548c\u53f0\u9636\u9ad8\u5ea6\u3002<\/span><\/p>\n

Zeta-388\u51ed\u501f\u5728\u56fe\u5f62\u5316\u84dd\u5b9d\u77f3\u886c\u5e95\u00a0(PSS)\u5de5\u827a\u4e2d\u7684\u5e94\u7528\u8363\u83b72018\u5e74\u5316\u5408\u7269\u534a\u5bfc\u4f53\u884c\u4e1a\u91cf\u6d4b\u5956\u3002<\/strong><\/span><\/p>\n

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2019<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

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Filmetrics \u6b63\u5f0f\u52a0\u5165 KLA Instruments \u96c6\u56e2\u3002\u5728\u8584\u819c\u539a\u5ea6\u3001\u6750\u6599\u5149\u5b66\u7279\u6027\uff08n\u3001k \u503c\uff09\u7684\u6d4b\u91cf\u65b9\u9762\uff0cFilmetrics \u7cfb\u5217\u8584\u819c\u6d4b\u91cf\u4eea\u6269\u5145 KLA \u684c\u9762\u5f0f\u91cf\u6d4b\u4ea7\u54c1\u7ebf\u3002Filmetrics Profilm3D \u5149\u5b66\u8f6e\u5ed3\u4eea\u6269\u5145 KLA\u5149\u5b66\u8f6e\u5ed3\u4eea\u4ea7\u54c1\u7ebf\uff0c\u4e3a\u5ba2\u6237\u63d0\u4f9b\u9ad8\u6027\u4ef7\u6bd4\u7684\u8868\u9762\u5f62\u8c8c\u6d4b\u91cf\u89e3\u51b3\u65b9\u6848\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

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2020<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

<\/section>\n<\/section>\n
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Profilm3D-200 \u5177\u6709\u4e00\u4e2a\u884c\u7a0b\u4e3a 200mm\u7684\u81ea\u52a8\u6837\u54c1\u53f0\uff0c\u53ef\u653e\u7f6e200mm\u76f4\u5f84\u7684\u6676\u5706\u6837\u54c1\u3002<\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

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2023<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

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KLA Instruments\u00a0\u63a8\u51faZeta-20HR\u9ad8\u5206\u8fa8\u7387\u5149\u5b66\u8f6e\u5ed3\u4eea\uff0c<\/strong>\u4e13\u4e3a\u6ee1\u8db3\u65b0\u578b\u592a\u9633\u80fd\u7535\u6c60\u7684\u7ed3\u6784\u8868\u5f81\u548c\u4e0b\u4e00\u4ee3\u751f\u4ea7\u5de5\u827a\u7684\u91cf\u6d4b\u9700\u6c42\u800c\u8bbe\u8ba1\u3002<\/strong><\/span><\/p>\n

Zeta-20HR\u63d0\u9ad8\u4e86\u5149\u5b66\u8f6e\u5ed3\u4eea\u7684\u5206\u8fa8\u7387\uff0c\u5c06\u5bf9\u592a\u9633\u80fd\u7535\u6c60\u7ed3\u6784\u7684\u8868\u5f81\u80fd\u529b\u62d3\u5c55\u81f31\u00b5m\u4ee5\u4e0b\u3002\u8fd9\u6b3e\u65b0\u578b\u7684Zeta\u5149\u5b66\u8f6e\u5ed3\u4eea\uff0c\u57fa\u4e8e\u5177\u6709ZDot\u6280\u672f\u7684Zeta-20\u8bbe\u8ba1\uff0c\u53ef\u914d\u7f6e230mm x 230mm\u5c3a\u5bf8\u7684\u6837\u54c1\u8f7d\u53f0\uff0c\u5e76\u5177\u5907\u6240\u6709\u6807\u51c6\u5316\u4e14\u6613\u7528\u7684\u591a\u6a21\u7ec4\u6d4b\u91cf\u80fd\u529b\u3002Zeta\u5149\u5b66\u8f6e\u5ed3\u4eea\u662f\u592a\u9633\u80fd\u7535\u6c60\u5de5\u827a\u7814\u53d1\u548c\u5236\u7a0b\u63a7\u5236\u7684\u7406\u60f3\u91cf\u6d4b\u5de5\u5177\u3002<\/strong><\/span><\/p>\n<\/section>\n<\/section>\n<\/section>\n

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\u5982\u9700\u7533\u8bf7\u6d4b\u6837\u6216\u4ea7\u54c1\u54a8\u8be2,\u53ef\u901a\u8fc7\u4eea\u5668\u4fe1\u606f\u7f51\u548c\u6211\u4eec\u53d6\u5f97\u8054\u7cfb\uff01<\/span><\/p>\n

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 <\/p>","protected":false},"excerpt":{"rendered":"

    KLA Instruments\u62e5\u6709\u5982\u4eca\u7684\u5149\u5b66\u8f6e\u5ed3\u4eea\u7ec4\u5408\uff0c\u662f\u65e9\u5148\u5404\u54c1\u724c\u5408\u529b\u521b\u65b0\u7684\u7ed3\u679c […]<\/p>","protected":false},"author":1,"featured_media":2175,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[19],"tags":[],"class_list":["post-2174","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-xinwenzhongxin"],"acf":[],"_links":{"self":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts\/2174","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/comments?post=2174"}],"version-history":[{"count":1,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts\/2174\/revisions"}],"predecessor-version":[{"id":2185,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/posts\/2174\/revisions\/2185"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/media\/2175"}],"wp:attachment":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/media?parent=2174"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/categories?post=2174"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/tags?post=2174"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}