{"id":963,"date":"2025-03-22T14:49:48","date_gmt":"2025-03-22T06:49:48","guid":{"rendered":"https:\/\/firstnanosystem.com\/?p=963"},"modified":"2025-03-29T14:53:19","modified_gmt":"2025-03-29T06:53:19","slug":"jiyuklatanzhenshilunkuoyidebaomoyingliceliang","status":"publish","type":"post","link":"https:\/\/firstnanosystem.com\/en\/archives\/963","title":{"rendered":"\u57fa\u4e8eKLA\u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eea\u7684\u8584\u819c\u5e94\u529b\u6d4b\u91cf"},"content":{"rendered":"<p><span style=\"font-family: \u7b49\u7ebf; font-size: 10.5pt;\">\u968f\u7740\u5668\u4ef6\u5c3a\u5bf8\u4e0d\u65ad\u7f29\u5c0f\uff0c\u8868\u9762\u7fd8\u66f2\u5ea6\u53ef\u80fd\u5f15\u53d1\u4e00\u4e9b\u95ee\u9898\u4ece\u800c\u5f71\u54cd\u5668\u4ef6\u7684\u6b63\u5e38\u529f\u80fd\u3002\u5728\u534a\u5bfc\u4f53\u4e2d\uff0c\u8584\u819c\u5e94\u529b\u5bf9\u534a\u5bfc\u4f53\u80fd\u5e26\u9699\u504f\u79fb\u3001\u8d85\u5bfc\u8f6c\u53d8\u6e29\u5ea6\u548c\u78c1\u5404\u5411\u5f02\u6027\u7b49\u7535\u5b50\u7279\u6027\u6709\u76f4\u63a5\u5f71\u54cd\u3002<\/span><\/p>\n<p style=\"font-size: 10.5pt;\"><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u5728\u5668\u4ef6\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u76d1\u63a7\u56e0<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u8584\u819c\u6c89\u79ef\u800c\u4ea7\u751f\u7684\u5e94\u529b\u81f3\u5173\u91cd\u8981\u3002\u5728\u8584\u819c\u5c42\u9762\uff0c\u5e94\u529b\u901a\u5e38\u4f1a\u5f71\u54cd\u8584\u819c\u7684\u9644\u7740\u529b\u5e76\u4ea7\u751f\u6676\u683c\u7f3a\u9677\u548c\u8868\u9762\u518d\u6784\uff0c\u4ece\u800c\u9650\u5236\u539a\u5c42\u8584\u819c\u7684\u751f\u957f\u3002\u5728\u5668\u4ef6\u5c42\u9762\uff0c\u5e94\u529b\u7684\u5f62\u6210\u5f88\u5c11\u4f1a\u76f4\u63a5\u5bfc\u81f4\u826f\u7387\u4e0b\u964d\uff0c\u800c\u662f\u4f1a\u7f29\u77ed\u4ea7\u54c1\u4f7f\u7528\u5bff\u547d\u3002\u4f7f\u7528\u5bff\u547d\u7f29\u77ed\u4f1a\u5bfc\u81f4\u6bcf\u5e74\u5728\u4ea7\u54c1\u670d\u52a1\u548c\u4fdd\u4fee\u65b9\u9762\u82b1\u8d39\u6570\u767e\u4e07\u7f8e\u5143\uff0c\u8fd9\u662f\u4e00\u4e2a\u91cd\u5927\u95ee\u9898\u3002<\/span><\/p>\n<p style=\"font-size: 10.5pt;\"><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf; font-weight: bold;\">\u7ed3\u5408\u6210\u719f\u7684\u5e94\u529b\u8ba1\u7b97\u7406\u8bba\u6a21\u578b\u4e0e KLA \u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eea\u7684\u7cbe\u5bc6\u6d4b\u91cf\uff0c\u6211\u4eec\u53ef\u4ee5\u8fdb\u884c\u72ec\u7acb\u4e8e\u6750\u6599\u4e0e\u8868\u9762\u7279\u6027\u7684\u7cbe\u786e\u8584\u819c\u5e94\u529b\u6d4b\u3002<\/span><\/p>\n<p style=\"font-size: 10.5pt;\"><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf; font-weight: bold;\">\u80cc\u666f<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u5e94\u529b\u65e0\u6cd5\u76f4\u63a5\u6d4b\u91cf\uff0c\u5b83\u662f\u56e0\u8584\u819c\u6c89\u79ef\u800c\u4ea7\u751f\u7684\u3002\u8584\u819c\u6c89\u79ef\u4f1a\u5bfc\u81f4\u57fa\u7247\u5f2f\u66f2\u5e76\u6539\u53d8\u539f\u59cb\u5f62\u72b6\u3002\u57fa\u7247\u7684\u66f2\u7387\u534a\u5f84\u53ef\u4ee5\u901a\u8fc7\u6d4b\u91cf\u57fa\u7247\u7fd8\u66f2\u5ea6\u548c\u6320\u5ea6\u800c\u83b7\u5f97\u3002\u53ef\u4ee5\u91c7\u7528 G. 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font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">HRP \u7cfb\u5217\u548c <\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">Tencor<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0P \u7cfb\u5217\u6a21\u578b\u4e3a\u7528\u6237\u63d0\u4f9b\u4e24\u79cd\u5e94\u529b\u8ba1\u7b97\u7b97\u6cd5\uff1an \u9636\u591a\u9879\u5f0f\u548c 13 \u70b9\u6700\u5c0f\u4e8c\u4e58\u62df\u5408\u3002\u524d\u4ee3\u6a21\u578b\u4ec5\u63d0\u4f9b\u4e00\u79cd\u65b9\u6cd5\uff1a13 \u70b9\u6700\u5c0f\u4e8c\u4e58\u62df\u5408\u3002\u5728\u591a\u9879\u5f0f\u62df\u5408\u7a0b\u5e8f\u4e2d\uff0c\u7528\u6237\u53ef\u4ee5\u4f7f\u7528 5 \u9636\u30016 \u9636\u6216 7 \u9636\u591a\u9879\u5f0f\u6765\u8ba1\u7b97\u66f2\u7387\u534a\u5f84\u3002n \u9636\u591a\u9879\u5f0f\u6709 n+1 <\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u4e2a<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u7cfb\u6570\uff1a<\/span><\/p>\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/img58.chem17.com\/9\/20250329\/638788561673858343529.png\" alt=\"\u56fe\u7247\" width=\"554\" height=\"69\" \/><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u4e3a\u4e86\u786e\u5b9a\u8fd9\u4e9b\u7cfb\u6570\uff0c\u8003\u8651\u4f7f\u7528 3 \u9636\u591a\u9879\u5f0f\u7684\u793a\u4f8b\uff1a<\/span><\/p>\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/img58.chem17.com\/9\/20250329\/638788561674171224596.png\" alt=\"\u56fe\u7247\" width=\"554\" height=\"85\" \/><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u4e00\u5171\u9700\u8981\u56db\u4e2a\u65b9\u7a0b\u5f0f\u6765\u786e\u5b9a\u8fd9\u4e9b\u7cfb\u6570\u3002\u53ef\u4ee5\u7b80\u5355\u5730\u5c06\u4ee5\u4e0a\u65b9\u7a0b\u5f0f\u4e58\u4ee5 x3\u3001x2\u3001x \u548c 1\uff08\u672a\u77e5\u6570\u7684\u7cfb\u6570\uff09\uff0c\u751f\u6210\u8fd9\u4e9b\u65b9\u7a0b\u5f0f\u3002\u751f\u6210\u7684\u56db\u4e2a\u65b9\u7a0b\u5f0f\u5982\u4e0b\uff1a<\/span><\/p>\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/img58.chem17.com\/9\/20250329\/638788561674483783486.png\" alt=\"\u56fe\u7247\" width=\"554\" height=\"313\" \/><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u4f7f\u7528Crout\u6cd5\u6c42\u89e3\u8054\u7acb\u65b9\u7a0b\u5f0f\uff0c\u5373\u53ef\u786e\u5b9a\u8fd9\u56db\u4e2a\u7cfb\u6570\uff0c\u5e76\u83b7\u5f97\u5c06\u9ad8\u5ea6\u8868\u793a\u4e3a\u4f4d\u7f6e\u51fd\u6570\u7684\u591a\u9879\u5f0f\u3002\u66f2\u7387\u534a\u5f84\u7531\u591a\u9879\u5f0f\u7684\u4e8c\u9636\u5bfc\u6570\u786e\u5b9a\u3002<\/span><\/p>\n<p style=\"font-size: 10.5pt;\"><span style=\"font-size: 10.5pt; 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font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u4e2a<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u70b9\u7684\u5c40\u90e8\u66f2\u7387\uff08\u5176\u4e2d N \u4e3a\u6570\u636e\u6bb5\u4e2d\u6570\u636e\u70b9\u7684\u603b\u6570\uff09\uff0c\u53ef\u786e\u5b9a\u5c40\u90e8\u7684\u66f2\u7387\u534a\u5f84\u3002\u6bcf\u4e2a\u6570\u636e\u6bb5\u7684\u5e73\u5747\u66f2\u7387\u662f\u5c40\u90e8\u66f2\u7387\u7684\u5747\u503c\u3002<\/span><\/p>\n<p style=\"font-size: 10.5pt;\"><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u5c40\u90e8\u66f2\u7387\u7684\u8ba1\u7b97\u65b9\u6cd5\u9700\u8981 2 \u9636\u591a\u9879\u5f0f\uff08\u5176\u4e2d\u4e8c\u9636\u5bfc\u6570\u7528\u4e8e\u8ba1\u7b97\u66f2\u7387\uff09\u3002\u591a\u9879\u5f0f\u7684\u4e00\u822c\u65b9\u7a0b\u5f0f\u5982\u4e0b\uff1a<\/span><\/p>\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/img58.chem17.com\/9\/20250329\/638788561674796207623.png\" alt=\"\u56fe\u7247\" width=\"546\" height=\"108\" \/><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u8be5\u65b9\u7a0b\u5f0f\u7684\u671f\u671b\u503c\u4e3a\uff1a<\/span><\/p>\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/img48.chem17.com\/9\/20250329\/638788561675205139640.png\" alt=\"\u56fe\u7247\" width=\"554\" height=\"119\" \/><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u901a\u8fc7\u4ee5\u4e0b\u65b9\u7a0b\u5f0f\u5c06\u6b8b\u5dee (<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">yi<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">&#8211; <\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u0177i<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">) \u5e73\u65b9\u548c\u6700\u5c0f\u5316\uff1a<\/span><\/p>\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/img48.chem17.com\/9\/20250329\/638788561675517713479.png\" alt=\"\u56fe\u7247\" width=\"554\" height=\"69\" \/><img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/img48.chem17.com\/9\/20250329\/638788561675830147270.png\" alt=\"\u56fe\u7247\" width=\"554\" height=\"118\" \/><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u5176\u4e2d n \u4e3a\u7b2c\u4e00\u4e2a\u6570\u636e\u70b9\u3002\u8fd9\u4e9b\u65b9\u7a0b\u5f0f\u8fdb\u4e00\u6b65\u7b80\u5316\u4e3a\uff1a<\/span><\/p>\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/img48.chem17.com\/9\/20250329\/638788561676142650284.png\" alt=\"\u56fe\u7247\" width=\"554\" height=\"136\" \/><span style=\"font-size: 10.5pt; 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font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u5706\u4f7f\u7528<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u4e24\u4e2a\u5b9a\u4f4d\u9500\uff0c\u6709\u5e73\u8fb9\u7684\u6676<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u5706\u4f7f\u7528<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u4e09\u4e2a\u5b9a\u4f4d\u9500\uff09\u3002\u9700\u8981\u6ce8\u610f\u7684\u662f\uff0c\u652f\u6491\u9500\u9489\u548c\u5b9a\u4f4d\u9500\u7684\u4f4d\u7f6e\u9700\u8981\u6839\u636e\u6837\u54c1\u5927\u5c0f\u8fdb\u884c\u8c03\u6574\u3002\u652f\u6491\u9500\u9489\u5c06\u6837\u54c1\u4fdd\u6301\u5728\u9002\u4e2d\u4f4d\u7f6e\uff0c\u901a\u8fc7\u5747\u5300\u5206\u5e03\u6837\u54c1\u91cd\u91cf\uff0c\u9632\u6b62 (a) <\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u8f7d\u53f0\u5f62\u72b6<\/span><span style=\"font-size: 10.5pt; 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