{"id":969,"date":"2025-03-25T22:52:41","date_gmt":"2025-03-25T14:52:41","guid":{"rendered":"https:\/\/firstnanosystem.com\/?p=969"},"modified":"2025-03-29T23:57:00","modified_gmt":"2025-03-29T15:57:00","slug":"xinyingyongklanamiyahenyiduidianchicailiaodeceliang","status":"publish","type":"post","link":"https:\/\/firstnanosystem.com\/en\/archives\/969","title":{"rendered":"\u65b0\u5e94\u7528\u2014KLA\u7eb3\u7c73\u538b\u75d5\u4eea\u5bf9\u7535\u6c60\u6750\u6599\u7684\u6d4b\u91cf"},"content":{"rendered":"<p><span style=\"font-family: \u7b49\u7ebf; font-size: 10.5pt;\">\u7535\u6c60\u7684\u5e94\u7528\u6781\u4e3a\u5e7f\u6cdb\uff0c\u5176\u901a\u5e38\u4ee5\u7535\u5316\u5b66\u53cd\u5e94\u6c60\u7684\u5f62\u5f0f\u4e3a\u5404\u7c7b\u88c5\u7f6e\u4f9b\u7535\u3002\u7535\u6c60\u5185\u5728\u5931\u6548\u548c\u52a3\u5316\u5bf9\u7535\u6c60\u6027\u80fd\u6709\u91cd\u5927\u5f71\u54cd\uff0c\u800c\u5176\u673a\u5236\u4f9d\u8d56\u4e8e\u4e0d\u540c\u7ec4\u6210\u6750\u6599\u4e4b\u95f4\u7684\u7535\u5316\u5b66\u53cd\u5e94\u548c\u7eb3\u7c73\u529b\u5b66\u76f8\u4e92\u4f5c\u7528\u3002\u4e0b\u4e00\u4ee3\u7535\u6c60\u8981\u6c42\u9ad8\u80fd\u91cf\u5bc6\u5ea6\u548c\u9ad8\u5145\u653e\u7535\u500d\u7387\uff08C-rate\uff0c\u5145\u653e\u7535\u901f\u7387\u7684\u4e00\u79cd\u8861\u91cf\u6807\u51c6\uff09\u3002\u4e3a\u6b64\uff0c\u4e1a\u754c\u5728\u65b0\u6750\u6599\u3001\u5236\u9020\u5de5\u827a\u548c\u96c6\u6210\u5de5\u827a\u7b49\u65b9\u9762\u505a\u51fa\u4e86\u5de8\u5927\u52aa\u529b\uff0c\u4ee5\u4f18\u5316\u7535\u6c60\u5728\u66f4\u5bbd\u6e29\u5ea6\u8303\u56f4\u5185\u7684\u6027\u80fd\u3002<\/span><\/p>\n<p style=\"font-size: 10.5pt;\"><span style=\"font-size: 10.5pt; 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font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u56fe2\uff08\u4e0a\uff09\u5c55\u793a\u4e86\u5f39\u6027\u6a21\u91cf\u6d4b\u91cf\u503c\u968f\u6df1\u5ea6\u7684\u53d8\u5316\uff0c\u63d2\u56fe\u4e3aLiNiCoMnO2\u8868\u9762\u7684SEM\u56fe\u50cf\u3002\u56fe2\uff08\u4e0b\uff09\u5c55\u793a\u4e86\u6b63\u6781\u786c\u5ea6\u6d4b\u91cf\u503c\u968f\u6df1\u5ea6\u7684\u53d8\u5316\uff0c\u63d2\u56fe\u4e3a\u4f5c\u52a8\u5668\u7684\u793a\u610f\u56fe\u3002\u8bbe\u5907\u63d0\u4f9b\u4e0d\u540c\u7684\u6d4b\u8bd5\u6a21\u5f0f\uff0c\u4ee5\u9002\u914d\u8868\u9762\u7c97\u7cd9\u5ea6\u4e0d\u540c\u7684\u5404\u7c7b\u6750\u6599\u3002<\/span><\/p>\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter\" src=\"http:\/\/img42.chem17.com\/9\/20250329\/638788881271169903106.png\" alt=\"\u56fe\u7247\" width=\"554\" height=\"423\" \/><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter\" src=\"http:\/\/img42.chem17.com\/9\/20250329\/638788881271638870889.png\" alt=\"\u56fe\u7247\" width=\"554\" height=\"418\" \/><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p style=\"text-align: center;\"><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u56fe2. \u6b63\u6781\u6750\u6599\u6a21\u91cf\uff08\u4e0a\uff09\u548c\u786c\u5ea6\uff08\u4e0b\uff09\u968f\u538b\u5165\u6df1\u5ea6\u7684\u53d8\u5316\uff0c\u63d2\u56fe\u5206\u522b\u4e3a<\/span><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf; font-weight: bold;\">LiNiCoMnO2<\/span><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u8868\u9762\u7684<\/span><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf; font-weight: bold;\">SEM<\/span><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u56fe\u50cf\u548c<\/span><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf; font-weight: bold;\">KLA<\/span><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u4f5c\u52a8\u5668\u793a\u610f\u56fe\u3002SEM \u56fe\u50cf\u6765\u6e90\uff1aMTI Corporation\u3002<\/span><\/p>\n<p style=\"font-size: 10.5pt;\"><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf; font-weight: bold;\">03\u6b63\u6781\u590d\u5408\u6750\u6599\u7684\u9ad8\u901f\u7eb3\u7c73\u529b\u5b66\u6027\u80fd\u6210\u50cf<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u4f7f\u7528<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">NanoBlitz<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a03D\u529f\u80fd\uff0c\u53ef\u4ee5\u5bf9\u6750\u6599\u8868\u9762\u8fdb\u884c\u7eb3\u7c73\u529b\u5b66\u6027\u80fd\u6210\u50cf\uff0c\u5176\u5728\u7528\u6237<a class=\"bjFfcClass\" style=\"color: red;\">\u6307\u5b9a<\/a>\u533a\u57df\u8fd0\u884c\u538b\u75d5\u70b9\u9635\uff0c\u6bcf1\u79d2\u5373\u53ef\u5b8c\u6210\u4e00\u4e2a\u538b\u75d5\u70b9\u7684\u6570\u636e\u6d4b\u91cf\u3002<\/span><\/p>\n<p style=\"font-size: 10.5pt;\"><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u56fe3\u5c55\u793a\u4e86\u4e00\u79cd<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u9502<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u79bb\u5b50\u7535\u6c60\u6b63\u6781\u7684\u6a21\u91cf\uff08\u4e0a\uff09\u548c\u786c\u5ea6\uff08\u4e0b\uff09\u4e91\u56fe\uff0c\u8be5\u6b63\u6781\u4e2d\u5305\u542b<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u9502\u954d\u9530<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u94b4\u6c27\u5316\u7269\uff08LiNiCoMnO2\uff1a5:2:3\uff09\u6d3b\u6027\u9897\u7c92\u7684\u6df7\u5408\u7269\u3002<\/span><\/p>\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter\" src=\"http:\/\/img42.chem17.com\/9\/20250329\/638788881272419987758.png\" alt=\"\u56fe\u7247\" width=\"554\" height=\"451\" \/><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter\" src=\"http:\/\/img42.chem17.com\/9\/20250329\/638788881273357483950.png\" alt=\"\u56fe\u7247\" width=\"522\" height=\"417\" \/><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p style=\"text-align: center;\"><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u56fe3. \u6b63\u6781\u6d82\u5c42\u7684\u5f39\u6027\u6a21\u91cf\uff08\u4e0a\uff09\u548c\u786c\u5ea6\uff08\u4e0b\uff09\u7684\u7eb3\u7c73\u538b\u75d5\u6210\u50cf\u3002<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u4e0b\u56fe\u7684\u56fe4\u4e2d\uff0c\u5728\u6b63\u6781\u6d82\u5c42\u8868\u9762\u6807\u793a\u4e86\u8fdb\u884c<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">NanoBlitz<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a03D\u6210\u50cf\u7684\u533a\u57df\u3002\u4e0e\u4f20\u7edf\u7684\u8fde\u7eed\u521a\u5ea6\u6d4b\u91cf(CSM)\u65b9\u6cd5\u76f8\u6bd4\uff0c<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">NanoBlitz<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a03D\u7eb3\u7c73\u538b\u75d5\u6d4b\u8bd5\u5177\u6709\u66f4\u9ad8\u7684\u4fe1\u566a\u6bd4\uff0c\u5e76\u80fd\u5feb\u901f\u533a\u5206\u6837\u54c1\u4e2d\u5404\u7269\u76f8\u7684\u529b\u5b66\u6027\u80fd\u53ca\u5176\u7a7a\u95f4\u5206\u5e03\uff0c\u56e0\u800c\u662f\u4e00\u79cd\u6781\u4e3a\u5b9e\u7528\u7684\u6d4b\u8bd5\u65b9\u6cd5\u3002<\/span><\/p>\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/img42.chem17.com\/9\/20250329\/638788881274607600870.png\" alt=\"\u56fe\u7247\" width=\"554\" height=\"446\" \/><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p style=\"text-align: center;\"><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u56fe4. <\/span><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf; font-weight: bold;\">NanoBlitz<\/span><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf; font-weight: bold;\">\u00a03D<\/span><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u6d4b\u8bd5\u533a\u57df\u5982\u6b63\u6781\u8868\u9762\u4e0a\u7684\u65b9\u6846\u6240\u793a\u3002<\/span><\/p>\n<p style=\"font-size: 10.5pt;\"><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf; font-weight: bold;\">04\u5355\u4e2a\u9897\u7c92\u539f\u4f4d\u538b\u7f29<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u5236\u9020\u8fc7\u7a0b\u5e38\u4f1a\u53d1\u751f\u9897\u7c92\u5f00\u88c2\uff0c\u8fd9\u5c06\u5bfc\u81f4\u8fdb\u4e00\u6b65\u7684\u6709\u5bb3\u526f\u53cd\u5e94\u3002\u4f7f\u7528KLA Instruments\u7684<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">InSEM<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00ae \u539f\u4f4d\u7eb3\u7c73\u529b\u5b66\u6d4b\u8bd5\u7cfb\u7edf\uff0c\u53ef\u4ee5\u5bf9\u9897\u7c92\u5f00\u88c2\u8fdb\u884c\u539f\u4f4d\u89c2\u5bdf\u5e76\u540c\u6b65\u6d4b\u91cf\u9897\u7c92\u7684\u538b\u7f29\u5f3a\u5ea6\uff0c\u5176\u8fd8\u53ef\u4ee5\u539f\u4f4d\u6d4b\u91cf\u590d\u5408\u6d82\u5c42\u7684\u529b\u5b66\u6027\u8d28\u3002<\/span><\/p>\n<p style=\"font-size: 10.5pt;\"><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u4e0b\u56fe\u7684\u56fe5\u5c55\u793a\u4e86\u9897\u7c92\u538b\u7f29\u6d4b\u8bd5\u4e4b\u524d\u53ca\u4e4b\u540e\u7684<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">InSEM<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u89c6\u9891\u56fe\u50cf\u3002<\/span><\/p>\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter\" src=\"http:\/\/img42.chem17.com\/9\/20250329\/638788881275232546992.png\" alt=\"\u56fe\u7247\" width=\"403\" height=\"302\" \/><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p style=\"text-align: center;\"><span style=\"color: #808080; font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u56fe5-01. \u9897\u7c92\u538b\u7f29\u6d4b\u8bd5\u4e4b\u524d\u7684<\/span><span style=\"color: #808080; font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">InSEM<\/span><span style=\"color: #808080; font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0\u89c6\u9891\u56fe\u50cf<\/span><\/p>\n<p style=\"font-size: 10.5pt;\"><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/img42.chem17.com\/9\/20250329\/638788881275701274798.png\" alt=\"\u56fe\u7247\" width=\"403\" height=\"302\" \/><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p style=\"text-align: center;\"><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u56fe5-02. \u9897\u7c92\u538b\u7f29\u6d4b\u8bd5\u4e4b\u540e\u7684<\/span><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">InSEM<\/span><span style=\"color: #808080; font-size: 9pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0\u89c6\u9891\u56fe\u50cf<\/span><\/p>\n<p style=\"font-size: 10.5pt;\"><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u00a0<\/span><\/p>\n<p><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u4e0b\u56fe\u7684\u56fe6\u5c55\u793a\u4e86\u76f8\u5e94\u7684\u9897\u7c92\u7684\u8f7d\u8377-\u538b\u7f29\u91cf\u66f2\u7ebf\uff08\u4e0a\uff09\u548c\u65ad\u88c2\u5e94\u529b\uff08\u4e0b\uff09\u3002<\/span><\/p>\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/img42.chem17.com\/9\/20250329\/638788881276170011413.png\" alt=\"\u56fe\u7247\" width=\"554\" height=\"416\" \/><img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/img42.chem17.com\/9\/20250329\/638788881276638660184.png\" alt=\"\u56fe\u7247\" width=\"554\" height=\"388\" \/><span style=\"font-size: 10.5pt; 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font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u6211\u4eec\u7684<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">ProbeDMATM<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u6280\u672f\u53ef\u7528\u4e8e\u7c98\u7ed3\u6750\u6599\u7684\u5c40\u90e8\u52a8\u6001\u529b\u5b66\u5206\u6790(DMA)\u6d4b\u8bd5\u3002\u5176\u4f18\u52bf\u5728\u4e8e\uff0c<\/span><span style=\"font-size: 10.5pt; font-family: \u7b49\u7ebf; mso-fareast-font-family: \u7b49\u7ebf;\">\u53ef\u901a\u8fc7\u7eb3\u7c73\u538b\u75d5\u4eea\u5b9a\u4f4d\u8868\u9762\u7684\u7279\u5b9a\u4f4d\u7f6e\uff0c\u4ee5\u91cf\u5316\u7814\u7a76\u6837\u54c1\u5c40\u90e8\u7684\u529b\u5b66\u6027\u80fd\u3002\u56fe7\u6bd4\u8f83\u4e86\u5e72\u71e5\u548c\u6f6e\u6e7f\u6761\u4ef6\u4e0b\uff0c\u6d4b\u91cf\u5f97\u5230\u7684\u7c98\u7ed3\u5242\u50a8\u5b58\u6a21\u91cf\uff0c\u6d4b\u8bd5\u9891\u7387\u4e3a10Hz\u3002<\/span><\/p>\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/img42.chem17.com\/9\/20250329\/638788881276951287786.png\" alt=\"\u56fe\u7247\" width=\"554\" height=\"221\" \/><span style=\"font-size: 10.5pt; 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