{"id":2041,"date":"2025-08-01T16:51:39","date_gmt":"2025-08-01T08:51:39","guid":{"rendered":"https:\/\/firstnanosystem.com\/?post_type=product&#038;p=2041"},"modified":"2025-08-01T16:52:23","modified_gmt":"2025-08-01T08:52:23","slug":"at610-jingjixingyuanzicengchenjishebei","status":"publish","type":"product","link":"https:\/\/firstnanosystem.com\/en\/product\/at610-jingjixingyuanzicengchenjishebei","title":{"rendered":"AT610\nThe AT610 is the most cost-effective 6\u2033 thermal ALD tool on the market."},"content":{"rendered":"<p><span style=\"font-family: arial, helvetica, sans-serif;\">The AT610 Economical Atomic Layer Deposition (ALD) System is a benchtop system with a small footprint. It adopts semiconductor-grade metal-sealed pipelines and high-temperature compatible fast-pulse Atomic Layer Deposition (ALD) valves. It is equipped with an ultra-fast Mass Flow Controller (MFC) integrated with inert gas purging functionality. The system comes with a 6-inch circular chuck (supporting a maximum of 7-inch square samples) and can be customized to accommodate smaller-sized samples or samples of other shapes (with a height of 11 mm).<\/span><\/p>","protected":false},"excerpt":{"rendered":"<p>AT610 \u7ecf\u6d4e\u6027\u539f\u5b50\u5c42\u6c89\u79ef\u8bbe\u5907\u662f\u5c0f\u5360\u5730\u9762\u79ef\u53f0\u5f0f\u7cfb\u7edf\u3002\u91c7\u7528\u534a\u5bfc\u4f53\u7ea7\u91d1\u5c5e\u5bc6\u5c01\u7ba1\u8def\u4ee5\u53ca\u517c\u5bb9\u9ad8\u6e29\u7684\u5feb\u901f\u8109\u51b2\u539f\u5b50\u5c42\u6c89\u79ef [&hellip;]<\/p>","protected":false},"featured_media":2042,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false},"product_brand":[],"product_cat":[59],"product_tag":[],"class_list":{"0":"post-2041","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-bomo","8":"first","9":"instock","10":"shipping-taxable","11":"product-type-simple"},"acf":[],"_links":{"self":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product\/2041","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/comments?post=2041"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/media\/2042"}],"wp:attachment":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/media?parent=2041"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product_brand?post=2041"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product_cat?post=2041"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product_tag?post=2041"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}