{"id":748,"date":"2024-08-20T15:40:26","date_gmt":"2024-08-20T07:40:26","guid":{"rendered":"https:\/\/www.firstnano.de\/?post_type=product&#038;p=748"},"modified":"2025-08-20T14:49:57","modified_gmt":"2025-08-20T06:49:57","slug":"zonghewuxingceliangxitong-ppms-4","status":"publish","type":"product","link":"https:\/\/firstnanosystem.com\/en\/product\/zonghewuxingceliangxitong-ppms-4","title":{"rendered":"PACTO-10H\/20H Microwave Plasma System For Wafer Processing"},"content":{"rendered":"<p><span style=\"font-family: arial, helvetica, sans-serif;\">ASTRO PACTO-10H\/20H is a highly integrated microwave plasma descumming machine equipped with a temperature-controlled stage. It can meet the processes such as dry descumming of 2-inch to 12-inch wafers or wafer surface activation.<\/span><\/p>","protected":false},"excerpt":{"rendered":"<p>ASTRO PACTO-10H\/20H\u662f\u4e00\u6b3e\u9ad8\u96c6\u6210\u5316\u7684\u5e26\u6e29\u63a7\u53f0\u76d8\u7684\u5fae\u6ce2\u7b49\u79bb\u5b50\u53bb\u80f6\u673a\uff0c\u53ef\u6ee1\u8db32-12\u5bf8\u6676\u5706\u5e72\u6cd5\u53bb [&hellip;]<\/p>","protected":false},"featured_media":736,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false},"product_brand":[],"product_cat":[24,60],"product_tag":[],"class_list":{"0":"post-748","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-semiprocess","7":"product_cat-keshi","9":"first","10":"instock","11":"shipping-taxable","12":"product-type-simple"},"acf":[],"_links":{"self":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product\/748","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/comments?post=748"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/media\/736"}],"wp:attachment":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/media?parent=748"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product_brand?post=748"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product_cat?post=748"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product_tag?post=748"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}