{"id":808,"date":"2025-02-06T19:23:01","date_gmt":"2025-02-06T11:23:01","guid":{"rendered":"https:\/\/firstnanosystem.com\/?post_type=product&#038;p=808"},"modified":"2025-04-30T17:50:26","modified_gmt":"2025-04-30T09:50:26","slug":"hrp-260","status":"publish","type":"product","link":"https:\/\/firstnanosystem.com\/en\/product\/hrp-260","title":{"rendered":"HRP\u00ae-260 Stylus Profiler"},"content":{"rendered":"<p><span style=\"font-size: 16px;\">HRP<sup>\u00ae<\/sup>-260 is a high resolution, cassette-to-cassette stylus profiler offering step height measurement capability from a few nanometers to 300\u00b5m. The P-260 configuration supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 200mm without stitching. The HRP<sup>\u00ae<\/sup>-260 high resolution profiler configuration offers the same capability as the P-260, plus a high resolution stage that produces scanning results similar to an AFM. The high resolution profiler HRP platform has advanced pattern recognition algorithms that enhance recipe transportability between systems, a key requirement for a 24x7 production environments.<\/span><\/p>\n<p>&nbsp;<\/p>\n<p><span style=\"font-size: 16px;\">HRP<sup>\u00ae<\/sup>-260 high-resolution, cassette-to-cassette stylus profiler offers production proven performance with automated wafer handling capability serving the semiconductor, compound semiconductor, high brightness LED, data storage and related industries. The P-260 configuration supports 2D and 3D high-resolution measurements of step heights, roughness, bow, and stress for scans up to 200mm without stitching. The HRP<sup>\u00ae<\/sup>-260 configuration offers the same capability as the P-260, plus a high-resolution stage to measure small features at higher resolution and faster throughput.<\/span><\/p>\n<p>&nbsp;<\/p>\n<p><span style=\"font-size: 16px;\">HRP<sup>\u00ae<\/sup>-260 offers dual stage capability for measurement of nano- and micro-surface topography. The P-260 configuration offers long scan (up to 200mm) capability without stitching, and the HRP<sup>\u00ae<\/sup>-260 offers a high-resolution scanning stage for up to 90\u00b5m scan lengths. The P-260 achieves excellent measurement stability with a combination of the UltraLite<sup>\u00ae<\/sup>sensor, constant force control and ultra-flat scanning stage. The HRP<sup>\u00ae<\/sup>-260 enhances the capability with a high-resolution piezoelectric scanning stage. Recipe setup is fast and easy with point-and-click stage controls, low and high magnification optics, and high-resolution digital cameras. The HRP<sup>\u00ae<\/sup>-260 supports 2D and 3D surface measurement, with a variety of filtering, leveling, and data analysis algorithms to quantify the surface topography. Fully automated measurements are achieved with automated wafer handling, pattern recognition, sequencing and feature detection.<\/span><\/p>","protected":false},"excerpt":{"rendered":"<p>HRP\u00ae-260\u662f\u4e00\u4e2a\u9ad8\u5206\u8fa8\u7387\u3001\u81ea\u52a8\u5316\u63a2\u9488\u5f0f\u8f6e\u5ed3\u4eea\uff0c\u63d0\u4f9b\u4ece\u51e0\u7eb3\u7c73\u5230 300 \u5fae\u7c73\u7684\u53f0\u9636\u9ad8\u5ea6\u6d4b\u91cf\u529f\u80fd\u3002P-260 [&hellip;]<\/p>","protected":false},"featured_media":815,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false},"product_brand":[],"product_cat":[24,58,44],"product_tag":[],"class_list":{"0":"post-808","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-semiprocess","7":"product_cat-celiang","8":"product_cat-stylus-profilers","10":"first","11":"instock","12":"featured","13":"shipping-taxable","14":"product-type-simple"},"acf":[],"_links":{"self":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product\/808","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/comments?post=808"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/media\/815"}],"wp:attachment":[{"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/media?parent=808"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product_brand?post=808"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product_cat?post=808"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/firstnanosystem.com\/en\/wp-json\/wp\/v2\/product_tag?post=808"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}