Filmetrics® R50-4PP Four-Point Probe System and Filmetrics R50-EC Eddy Current System
The introduction of the Filmetrics R50 added benchtop sheet resistance and conductivity mapping systems to the KLA Instruments metrology portfolio.
The Filmetrics R50 is the latest innovation in KLA benchtop sheet resistance and conductivity mapping systems. Since the introduction of our first resistivity gauge in 1975, our product groups have revolutionized the measurement of both sheet resistance and thickness for conductive layers.
- Thickness Measurement of Metal Thin Films and Backside Process Layers
- Substrate Resistivity
- Sheet Resistance
- Thin Film Thickness or Resistivity
- Conductivity of Thin Layers and Bulk Materials
For industry experts, academics and other innovators, KLA Instruments delivers trusted measurements, enabling the world’s breakthrough technologies.
The Filmetrics R54 advanced sheet resistance and conductivity mapping systems deliver R50 performance capability within a light-tight enclosure with additional capability to support semiconductor and compound semiconductor applications, including implant and epitaxial wafers.
