The unique outer shell and drain design allows easy switching between table-top and in-deck model. The modular design enables the user to upgrade the unit using a wide range of different accessories to ease dispensing and overall handling.
The SPINx-Series is equipped with a liquid filter trap to protect the critical components of our spin coaters, such as the drive unit, vacuum valve, vacuum sensor and ServoBL Controller. The liquid filter trap will capture any liquids entering the vacuum lines via the process chamber or vacuum chuck. Any resists or fluids will be safely kept in a liquid jar/bottle, which can be viewed through a cut-out in the spinner housing. We recommend that all our customers check the liquid jar/bottle during their maintenance schedule and empty the bottle in case any liquids are present.
The vacuum chuck sits above the edge of the bowl allowing easy access to the wafer/substrate with an end-effector, tweezers or vacuum wand. This is a unique requirement to enable robot handling.
The SPINx-series has the ability to define a motor homing position, allowing for easy integration in robot controlled/automated environments.
- Liquid filter trap
- Automatic lid, also controllable via foot pedal (advanced version)
- Programmable motor homing position
- Center injection holder for syringe or dispense nozzle
- Lid lock and vacuum sensor for user safety
- Large (detachable) touchscreen display
- USB-port to store recipes on USB-drive and for software updates specifications drive-unit
- Indirect brushless drive unit - up to 12.000 RPM
High acceleration and accuracy: 1 - 30.000 RPM
Clockwise/counter clockwise rotation and puddle mode
Unique design to switch between desktop and in-deck model
The spin coater is suitable for:
- Coating
- Cleaning
- Rinse/Dry
- Developing
- Etching
- PDMI and other processes
