微波等离子去胶机
ASTRO PACTO-10H/20H是一款高集成化的带温控台盘的微波等离子去胶机,可满足2-12寸晶圆干法去胶或晶圆表面活化等工艺。
ASTRO PACTO-10H/20H是一款高集成化的带温控台盘的微波等离子去胶机,可满足2-12寸晶圆干法去胶或晶圆表面活化等工艺。
Temperature control range: 1.9K – 400K continuous control 22 Temperature expansion: 50mK dilution refrigerator 0.4K He3 Refrigerator 1000K VSM high temperature furnace Temperature scanning rate: 0.01 – 8 K/min (non-self-cycling model) Temperature stability: ±0.2% T < 10K ±0.02% T > 10K Temperature control mode: fast mode, non-overshoot mode, scanning mode |
Magnetic field range: Superconducting magnets included (optional): ±9T; ±14T; ±16T Magnetic field resolution: 0.02 mT to 1 T 0.2 mT to 9 T Magnetic field stability: 1PPM/hour Field change rate: 10-200 Oe/s Remanence: < 5 Oe (9T in oscillating mode) Magnet operation modes: closed loop mode and drive mode Magnetic field approach mode: Oscillation mode Non-overshoot mode Linear Mode Scan Mode |