See your innovations come to life.。
The 4200A-SCS is a
customizable and fully-integrated parameter analyzer
that provides synchronized insight into current-voltage
(I-V), capacitance-voltage (C-V), and ultra-fast pulsed I-V
characterization. The highest performance parameter
analyzer, the 4200A-SCS accelerates semiconductor,
materials, and process development.
The 4200A-SCS ClariusTM GUI-based Software provides
clear, uncompromised measurement and analysis
capability. Furnished with embedded measurement
expertise and hundreds of ready-to-use application
tests, Clarius Software enables you to dig deeper into
your research with speed and confidence.
The 4200A-SCS Parameter Analyzer is completely
customizable and fully upgradable, so you can add the
instruments you need now – or later. With the 4200A-SCS
Parameter Analyzer, making connections to your bold
discoveries has never been easier.
Key Performance Specifications
I-V Source Measure Units (SMUs)
- ±210 V/100 mA or ±210 V/1 A modules
- 100 fA measure resolution
- 10 aA measure resolution with optional preamp
- 10 mHz – 10 Hz very low frequency capacitance
measurements
- 100 µF load capacitance
- 4-quadrant operation
- 2 or 4-wire connections
C-V Multi-frequency Capacitance Units (CVUs)
- AC impedance measurements (C-V, C-f, C-t)
- 1 kHz – 10 MHz frequency range
- ±30 V (60 V differential) built-in DC bias, expandable
to ±210 V (420 V differential)
- Simple switching between I-V and C-V measurements
with the optional CVIV Multi-Switch
Pulsed I-V Ultra-fast Pulse Measure Unit (PMU)
- Two independent or synchronized channels of
high-speed pulsed I-V source and measure
- 200 MS/s, 5 ns sampling rate
- ±40 V (80 Vp-p), ±800 mA
- Transient waveform capture mode
- Arbitrary waveform generator for multi-level pulse
waveform with 10 ns programmable resolution
High Voltage Pulse Generator Unit (PGU)
- Two channels of high-speed pulsed V source
- ±40 V (80 Vp-p), ±800 mA
- Arbitrary waveform generator Segment ARB®
mode for multi-level pulse waveform with 10 ns
programmable resolution
I-V/C-V Multi-Switch Module (CVIV)
- Easily switch between I-V and C-V measurements
without re-cabling or lifting prober needles
- Move the C-V measurement to any terminal without
re-cabling or lifting prober needles
- ±210 V DC bias capable
Remote Preamplifier/Switch Module (RPM)
- Automatically switches between I-V, C-V, and
ultra-fast pulsed I-V measurements
- Extends current sensitivity of the 4225-PMU
to tens of picoamps
- Reduces cable capacitance effects
