Model OAI 800E: Enhanced Front and Backside Semi-automatic Mask Aligner
The Model 800E Enhanced Semi-Automatic UV Mask Aligner is designed and manufactured by OAI.
With over 4 decades of product development
and manufacturing in the semiconductor
industry, OAI meets the growing challenge
of a dynamic market with an elite class of
photolithography equipment designed
for R&D and semi-automatic production.
Built on the proven OAI modular platform,
the Model 800E is an enhanced, highperformance high-resolution lithography
system which delivers a level of performance
that is unmatched at this price point. The
aligners feature OAI’s Advanced Beam
Optics offering exceptional uniformity.
Upgradable with OAI’s Precision Lithography
Modules, ther Model 800E is a versatile tool
in the lab or in the field. The Model 800E
utilizes Windows 10 control and recipe
storage. It also comes with joystick controlled
alignment and optics stages, and can be
configured with non-contact 3-point wedge
effect correction and auto-align capability.
These combined features are typically found in
more expensive mask aligners but are available
for an affordable price on the Model 800E.
