For more than half a century, OAI has been
a leader worldwide in UV Light and Energy
Measurement Instrumentation. This meter gives reliable, accurate calibrated
control of the photolithography processes in
the Semiconductor, MEMS, Wafer Packaging
and Wafer Bumping Industries.The Model
659 is an advanced UV Exposure Analyzer
specifically designed for use with all Wafer Steppers including High Intensity Wafer
Steppers. This meter stores up to 400 exposure
readings, has Ethernet and USB interface for
downloading recorded measurements, and has intensity range of up to 7,500mW/cm2
. Probes are
available in wavelengths of 365nm, 400nm, 420nm
and 436nm. OAI has a complete calibration lab to
maintain the performance, quality and reliability of
our meters. The Model 659 Meter is traceable to
NIST standards, and is ROHS2 and CE Compliant.
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Can be used with any Wafer Stepper
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Extremely accurate and reliable
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Perfect for High Intensity Wafer
Steppers
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Easily download measurements
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Range of up to 7,500mW/cm2
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Memory up to 400 measurements
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ROHS2 and CE compliant
Probes
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Designed for each individual stepper
to fit on the stage of the stepper
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Probe wavelengths (nm)
365, 400, 420, 436
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Multi-layer absorption
dielectric filters
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Interchangeable with any OAI
Model 659 Meter
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User Interface ： Touch screen
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Computer Interface ： Optional ethernet and USB for downloading recorded measurements
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Power Battery : Operated with rechargeable 3.7V Lithium Ion with charge protection
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Charger Power : 110-240 VAC
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Display Setup : Two Screens
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Setup screen - ethernet address, date, and time
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Run screen - wavelength, intensity, time, dose, probe temperature,
probe type, percent of deviation, serial number, calibration due
date, battery status, probe serial number, and charger status
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Memory Storage : Up to 400 readings
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Intensity Range : Up to 7,500mW/cm2
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Intensity Resolution : 0.01mW/cm2
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Dose Range : Up to 1000 J/cm2
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Dose Resolution : 0.01mJ/cm2
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Time Range : Up to 9999 seconds
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Time Resolution : 0.0001 seconds
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Minimum Dose Exposure : 25 ms
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Dimensions : 14”x8.25”x3.5”
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Weight : 3.5lbs.
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Operating Environment : 15º-40ºC
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Compliance : ROHS2 and CE (EMD and Safety)
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Probe Detector ： Silicon photodiode
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Available Wavelengths (nm) ： 365, 400, 420, 436
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Filters Multilayer ： absorption/dielectric
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Intensity Range : Up to 7,500mW/cm2
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Interchangeability ： Any Model 659 probe can be used with any Model 659 Meter
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Compliance : ROHS2 and CE (EMD and Safety)
