TEM and SEM plasma cleaner

TEM and SEM plasma cleaner

Tergeo-EM plasma cleaner can be used to remove hydrocarbon contaminations on TEM and SEM samples. It can accept two TEM specimen holders at the same time. The front adapter can be easily replaced to support more than two different types of TEMS. Users can also directly load SEM and TEM samples into the plasma chamber. The chamber is bigger enough to hold two 4″ wafers or more than a hundred TEM grids for cryo-EM hydrophilicity treatment. Tergeo-EM has been widely used to make TEM grid hydrophilic for cryo-EM applications. It can also activate the surface of the liquid cell in-situ chip. Unique dual plasma source design and pulsed mode operation enable a wide range of applications, including high-speed removal of STEM carbon burn marks, clean carbon deposition on column apertures, and gentle surface activation of ultra-thin holey carbon grids and graphene grids.

 

Tergeo-EM plasma cleaner

With two Thermo Fisher TEM specimen holders

 

Plasma cleaning and surface activation for TEM and SEM samples, grids, and holders

Customers in many prestigious research institutions around the world have purchased our Tergeo-EM plasma system for cryo-EM, in-situ TEM, materials research, and other types of high-resolution electron microscopy applications. Tergeo-EM plasma cleaning system and TEM holder vacuum storage system have been well received by TEM & SEM users in Caltech, UC-Berkeley, UIUC, NIH, Harvard, EAG Laboratories, French National Centre for Scientific Research (CNRS), Max-Planck-Institut in Germany, the University of Leeds in the UK, Tsinghua University in China, National University in Singapore, Seoul National University in South Korea, and so on. Many of our Tergeo-EM customers are former users of the other traditional TEM/SEM plasma cleaner products on the market. They all think our Tergeo-EM plasma system and vacuum storage system are much easier to use and are very versatile.

 

 

 

Tergeo-EM plasma cleaner can be used to remove hydrocarbon contaminations on TEM and SEM samples. It can accept two TEM specimen holders at the same time. The front adapter can be easily replaced to support more than two different types of TEMS. Users can also directly load SEM and TEM samples into the plasma chamber. The chamber is bigger enough to hold two 4″ wafers or more than a hundred TEM grids for cryo-EM hydrophilicity treatment. Tergeo-EM has been widely used to make TEM grid hydrophilic for cryo-EM applications. It can also activate the surface of the liquid cell in-situ chip. Unique dual plasma source design and pulsed mode operation enable a wide range of applications, including high-speed removal of STEM carbon burn marks, clean carbon deposition on column apertures, and gentle surface activation of ultra-thin holey carbon grids and graphene grids.

 

Applications:

  • Removing hydrocarbon contamination on TEM and SEM samples before imaging.

  • Removing carbon deposition after STEM imaging.

  • Making TEM grid hydrophilic for cryo-EM applications. Unique gentle downstream mode and pulsed plasma can handle ultra-thin carbon and graphene grids without damaging the fragile grids

  • Removing organic contamination and activating in-situ TEM and SEM chip surfaces. Making liquid cell surface hydrophilic.

  • Support ThermoFisher (FEI), JEOL, Hitachi, and TESCAN specimen holder, cryo-em autoloader cassette, SEM stud, and regular TEM grids on any holders

 

Product Features

 

Tergeo-EM plasma cleaner is the only TEM/SEM plasma cleaner that has integrated both direct/immersion mode plasma cleaning (samples are immersed in plasma) and remote/downstream mode plasma cleaning (samples are placed outside the plasma) in one system. Downstream plasma cleaning totally eliminates the ion sputtering of samples. In addition, a unique pulsed mode operation can generate extremely gentle plasma to reduce the plasma intensity further for delicate samples, such as ultra-thin holey carbon grids. Patented plasma intensity sensor technology monitors the plasma strength in real-time and provides the user with quantitative data on plasma intensity. It helps users to set up the right cleaning recipe for different types of samples. Tergeo-EM plasma system also has a unique proprietary method that can deposit high-density OH* hydroxyl functional group on the TEM grids and render the TEM grids super hydrophilic for Cryo-TEM and liquid in-situ TEM applications. Please contact us today for more details.

 

 

Tergeo-EM plasma cleaner can meet all the requirements, from high-speed cleaning for heavily contaminated apertures and electrodes in electron optics column to gentle cleaning for samples like graphene, carbon nanotube, DLC (diamond-like carbon), carbon fiber, or TEM samples on holey carbon grid. Tergeo-EM plasma cleaner is equipped with an oil-free dry pump safe for oxygen service. Tergeo-EM plasma system supports argon, oxygen, hydrogen, nitrogen, ambient air, and other proprietary process gases. Two to three mass flow-controlled gas delivery ports are available to mix multiple process gases.

 

细节展示

Tergeo-EM TEM/SEM 等离子体清洗机

Tergeo-EM TEM/SEM 等离子体清洗机

 

 

 

 

 

 

 

Tergeo-EM TEM/SEM 等离子体清洗机

 

 

 

 

 

 

Tergeo-EM TEM/SEM 等离子体清洗机

 

 

 

 

 

 

Tergeo-EM TEM/SEM 等离子体清洗机

TEM Specimen Holder Storage

 

  1. Total six storage cells per unit

  2. Each storage cell can be individually pumped or vented using solenoid valves. The remaining cells can still be kept under the vacuum when one of the holders is taken out.

  3. Multiple storage systems can be chain-linked to share the same vacuum pump. It can also share the same vacuum pump with the Tergeo-EM system.

  4. It can be pumped by an oil-free dry scroll pump or by a turbopump station.

  5. The vacuum pump is separated from the storage station, easy to maintain, and service the pump if necessary.

  6. All metal tubes under the vacuum to minimize the outgas, thus reducing the contamination.

  7. The stabilized operation temperature is slightly higher than the room temperature, which helps the specimen holder outgas faster.

TEM CUBE

 

The TEM cube chamber can be used to store up to eight TEM specimen holders under a high vacuum (ultimate vacuum in the mid-10-7Torr range). The vacuum level is high enough for leaking check of the in-situ TEM chips. It can also be fitted with a remote EM-KLEEN plasma source to perform plasma cleaning in the chamber. The size of the chamber is 9 inches cube. It can fit fairly large TEM and SEM samples and components. The chamber has a glass front door for observation.

The standard pumping configuration is to place the chamber directly on top of a Pfeiffer turbo pump station. But it’s also possible to pump the chamber using a dry scroll pump.

Compared with our regular TEM specimen holder vacuum storage station, each storage port on the TEM cube can’t be individually vented or pumped because all the storage port shares the same big vacuum chamber. It takes longer to retrieve the TEM specimen holder because the whole chamber must be vented to retrieve one stored TEM specimen holder.

It’s possible to use the TEM cube for plasma cleaning of TEM specimen holders and samples if the EM-KLEEN plasma source is installed on the chamber. But EM-KLEEN plasma source can only take one gas input. Standalone Tergeo-EM plasma cleaner can take up to three process gasses. The venting and pumping time on the TEM cube is also longer than the standalone Tergeo-EM plasma system. Tergeo-EM plasma systems also have a fully automatic operation with a higher level of system integration.

 

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