HVS series high vacuum sealer with getter activation
Applications:
Sealing and thermic encapsulation of MEMS
(Micro-Electro-Mechanical Systems)
Getter activation
(Deposition of reactive material that is placed inside a vacuum system)
Component separation during thermal processing in 2 temperature
zones
Features
Bottom and top heating
Up to 4 internal gas lines
Data logging
Vacuum up to 10-6 hPa
SIMATIC® Controller
Optical process control by 360 °C
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Applications
The 2Z-HVS is a high vacuum sealing unit which allows the
hermetically sealing of MEMS.
An electronic component can be processed before sealing in
2 heating zones with different temperatures up to 450 °C.
This allows also the getter activation. Up to 6 packages can
be processed in parallel. A key feature is the automatical
positioning and sealing of the parts, where both components
must have the same temperature. The control of different
heat-up ramp rates and /or ramp-down rates has been a huge
task which was excellent solved.
Process Gases
The system can be used with standard process gases, like Nitrogen, Oxygen, Forming Gas.
FLOW METER
One gas line with a Mass Flow Controller (MFC) is default,
three more gas line (Option: MFCs) are possible.
Vacuum Performance
The system is vacuum capable of up to 10-6 hPa.
temperature
The maximal achievable temperature is 450 °C.
Temperature Distribution
The hot plate allows an excellent temperature distribution and
homogeinity.
Programming
The 2Z-HVS is equipped with a SIMATIC® Controller which
allows the programming directly on the unit or by using the
USB interface and comfortable programming on a PC. It is
possible to store 20 programs with 100 steps each.
Cooling Process
The bottom hot plate is active water cooled. For chamber
housing cooling and external cooling is required (we
recommend a closed loop water cooling system.
(Accessories: WC-I)
Special
The process can be watched as the process chamber is
surrounded by a 360 ° glass zylinder.
