Model 656 UV Light & Energy Meter
The Model 656 Ultraviolet (UV) Intensity and Energy Meter is designed and manufactured by OAI. It is suitable for all contact / proximity mask aligners and flood exposure systems.
The Model 656 Ultraviolet (UV) Intensity and Energy Meter is designed and manufactured by OAI. It is suitable for all contact / proximity mask aligners and flood exposure systems.
Model 656 UV Light & Energy Meter
For over half a century, OAI has been a leader in the field of ultraviolet (UV) intensity and energy measurement instruments, which are used for reliable and precise calibration control in lithography processes across industries such as semiconductor manufacturing, microelectromechanical systems (MEMS), wafer packaging, and wafer bumping. The new Model 656 is an advanced UV exposure analyzer, specifically designed for contact/proximity mask aligners and flood exposure systems. This instrument can store up to 400 sets of exposure readings and is equipped with Ethernet and USB interfaces for downloading recorded measurement data, with a maximum intensity range of 2000 milliwatts per square centimeter. Optional probe wavelengths include 220 nm, 248 nm, 260 nm, 310 nm, 325 nm, 365 nm, 380 nm, 400 nm, 420 nm, 436 nm, and 540 nm. OAI maintains a comprehensive calibration laboratory to ensure the performance, quality, and reliability of our instruments. The Model 656 can be traced to National Institute of Standards and Technology (NIST) standards and complies with the requirements of EU RoHS 2 (Restriction of Hazardous Substances Directive 2) and CE (Conformité Européenne) certification.
Use with Contact/Proximity Aligners
Extremely accurate and reliable
Easily download measurements
Range of up to 2,000 mW/cm2
Memory up to 400 measurements
ROHS2 and CE compliant
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Specifications:
Meter Specifications
User Interface ： Touch screen
Computer Interface ： Optional ethernet and USB for downloading recorded measurements
Power Battery : Operated with rechargeable 3.7V Lithium Ion with charge protection
Charger Power : 110-240 VAC
Display Setup : Two Screens
Setup screen - ethernet address, date, and time
Run screen - wavelength, intensity, time, dose, probe temperature, probe type, percent of deviation, serial number, calibration due date, battery status, probe serial number, and charger status
Memory Storage : Up to 400 readings
Up to 2,000mW/cm2
Intensity Resolution : 0.01mW/cm2
Dose Range : Up to 1000 J/cm2
Dose Resolution : 0.01mJ/cm2
Time Range : Up to 9999 seconds
Time Resolution : 0.0001 seconds
Minimum Dose Exposure : 25 ms
Dimensions : 14”x8.25”x3.5”
Weight : 3.5lbs.
Operating Environment : 15º-40ºC
Compliance : ROHS2 and CE (EMD and Safety)
Probe Specifications
Probe Detector ： Silicon photodiode
Available Wavelengths 220nm, 248nm, 254nm 260nm, 310nm, 325nm, 365nm, 380nm 400nm, 420nm, 436nm and 540nm.
Filters Multilayer ： absorption/dielectric
Up to 2,000mW/cm2
Interchangeability Any Model 656 probe can be used with any Model 656 Meter
Compliance : ROHS2 and CE (EMD and Safety)
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