Zeta™-Solar Metallization Optical Profiler
The new Zeta-Solar metallization optical profiler is specifically designed for the unique requirements of advanced metallization finger, contact pad and busbar measurements. Advances in 3D imaging technology and an XY stage that accommodates solar cells up to 230mm x 230mm make the Zeta-Solar the ideal purpose-built metrology tool for end-of-line solar process development and process quality control.
KLA Instruments™ introduces the Zeta™-Solar, a new Zeta model that leverages advances in 3D imaging technology to simplify the imaging process and improve the cost of ownership to the highly competitive solar cell market. This optical profiler includes XY stage options to accommodate the latest generation solar cells up to 230mm x 230mm, as well as ½ cells and earlier generation solar cells. The Zeta-Solar software has been developed to seamlessly combine easy-to-use Profilm software with the well-established metallization measurements developed for other Zeta systems. Enhanced measurement mode analysis provides solar industry-specific metallization measurements and pass/fail output criteria.
