Alpha-Step® D-500 Stylus Profiler
The Alpha-Step D-500 stylus profiler supports 2D measurements of step height, roughness, bow and stress. The innovative optical lever sensor technology offers high resolution measurements, large vertical range and low force measurement capability.
An advantage of the profilometer’s stylus measurement technique is that it is a direct measurement, independent of material properties. Adjustable force and choice of stylus enable accurate measurements of a wide variety of structures and materials. This enables quantification of your process to determine the amount of material added or removed, plus any changes in structure by measuring roughness and stress.
Designed for universities, research labs and institutes, the Alpha-Step provides step height, roughness, and stress metrology for semiconductor and compound semiconductor devices, LEDs, solar, MEMS, automotive and medical devices.
