■Stylus Options
Tencor P-7提供多种探针用于测量台阶高度、台阶高宽比、粗糙度、样品翘曲度和应力。探针针尖的半径从100纳米到50微米不等，这决定了测量的横向分辨率。探针角度从20到100度不等，这决定了所测量特征的最大高宽比。所有探针都采用金刚石制造，以减少磨损并增加其使用寿命。
■Sample Chucks
The Tencor P-7 has a range of chucks available to support application requirements. The standard is a universal vacuum chuck with precision locating pins for samples of 50 to 150mm. The universal chuck supports bow and stress measurements with 3-point locators to support the sample in a neutral position. Additional options for solar samples and 200mm universal chucks are available.
■Isolation Tables
The Tencor P-7 has both tabletop and free-standing isolation table options. The Granite Isolator™ Series offers tabletop systems that combine granite with high grade silicone gel to provide passive isolation. The Onyx Series tabletop isolation systems use pneumatic air isolators to provide passive isolation. The TMC 63-500 Series isolation table is a free-standing steel frame table that uses pneumatic air isolators to provide passive isolation.
■Step Height Standards
The Tencor P-7 uses thin and thick film NIST-traceable step height standards offered by VLSI Standards. The standards feature an oxide step on a silicon die mounted on a quartz block, or an etched quartz step with a chrome coating. A step height range of 8nm to 250µm is available.
■Apex Analysis Software
Apex analysis software enhances the standard data analysis capability of the Tencor P-7 with an extended suite of leveling, filtering, step height, roughness, and surface topography analysis techniques. Apex supports ISO roughness calculation methods, plus local standards, such as ASME. Apex can also serve as a report writing platform with the capability to add text, annotations, and pass/fail criteria. Apex is offered in eleven languages. 
■Offline Analysis Software
The Tencor P-7 offline software has the same data analysis and recipe creation capability that exists on the tool. This enables the user to create recipes and analyze data without using valuable tool time.
■Pattern Recognition
Pattern recognition uses pre-taught patterns to automatically align the sample. This enables fully automated measurements for enhanced measurement stability by reducing the impact of operator error. Pattern recognition combined with advanced calibrations reduces stage positioning error and enables seamless transfer of recipes between systems.
■SECS/GEM and HSMS
SECS/GEM and HSMS communications support factory automation systems and enable remote control of the Tencor P-7. Measurements results are automatically reported to host SPC systems, plus alarms and key calibration/configuration data. The Tencor P-7 is compliant with SEMI standards E4, E5, E30, and E37.
