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Filmetrics® Profilm3D® Optical Profilometer

Profilm3D® Optical Profilometer

The Profilm3D® and Profilm3D-200 optical profilometers are affordable, non-contact, white light interferometry-based (WLI) 3D surface topography measurement systems. The latest generation of the white light interferometer includes new imaging modes that extend performance and value. The Profilm3D series interferometer measures nanometer- to millimeter-scale surface with a simple, flexible recipe setup, accommodating single scans or automated measurements on multiple sites to support both R&D and production environments.

 

The Filmetrics Profilm3D and Filmetrics Profilm3D-200 white light interferometers generate high-resolution measurements of the surface topography with sub-nanometer-level resolution. The tools support both vertical scanning and phase shifting interferometry. Phase Shift Imaging (PSI) can also be combined with WLI to enable PSI sensitivity over larger surface Z variation. Using TotalFocus® technology, Profilm3D provides stunning 3D natural color images with every pixel in focus. The latest generation of the Profilm3D white light interferometer introduces Enhanced Roughness imaging for measuring rougher surfaces, higher slopes and lower reflectivity surfaces.

 

Profilm® The software package adopts an advanced cloud-based approach.® Web services, mobile applications for Android and iOS, and advanced Profilm desktop software provide flexible data storage, visualization functions, and analysis solutions.

Features

Vertical scanning and phase shifting interferometry for measurement of surface features from nanometers to millimeters

TotalFocus 3D imaging with optimized focus for each pixel through the full measured range

True-Color imaging produces the actual sample colors for enhanced visualization, especially for subtle or buried features

Enhanced Roughness Mode (ERM) increases fringe contrast for improved fidelity on sloped surfaces such as lenses and enables signal improvement for rough surfaces

Automated focus with industry-leading long piezo travel range for scanning multiple surfaces separated by large height distances

Automated X-Y stage with a long travel range, great for mapping and stitching scans

The easy-to-use software package includes the advanced Profilm Desktop, cloud-based ProfilmOnline, and mobile applications, which can be used for flexible data storage, visualization functions, and analysis.

 

 

Industries

Universities, research labs and institutes

Silicon and compound semiconductor

Precision optics and mechanics

LED: Light emitting diodes

MEMS: Micro-electro-mechanical systems

Data storage

Automotive

Medical devices

And more: Contact us with your requirements

 

 

 

 

 

 

 

 

 

 

 

Applications

Step height: 3D step height from nanometers to millimeters

Texture & Form: 3D roughness, waviness, bow and shape

Texture characterization

Edge rolloff: 3D edge profile measurements

Defect review: 3D defect surface topography, defect characterization

High resolution scans over large, transparent film surfaces

High roughness, low reflectivity, scratch characterization

 

 

 

 

 

Equipment options Test Data Download

■Profilm3D 系列

Filmetrics Profilm3D 白光干涉仪具有电动 X-Y 向和 Z 向样品台，行程为 100 毫米，同时具有手动倾斜样品台。该系统支持相移和垂直扫描干涉测量法，能对3D表面形貌进行高分辨率测量。

The Zeta-20HR high resolution configuration extends the capabilities of the Zeta-20 optical profilometer with an enhanced design optimized for solar cell metrology applications, including a 230mm x 230mm stage and advanced solar texture analysis.

 

■Profilm Software Suite

The Filmetrics Profilm software package is comprehensive, intuitive, fast and user-friendly. 3D data operations and analysis functions such as leveling, filtering, step height, roughness, and surface topography analysis techniques are included in the basic configuration. Profilm supports ISO roughness calculation methods, plus local standards, such as ASME.

 

■ProfilmOnline Web Application

Filmetrics ProfilmOnline, as part of the Profilm software package, is a cloud-based 3D data visualization and analysis platform. Within ProfilmOnline, you can share, store, view, and analyze 3D data, whether you are using a computer or a mobile device. This application is compatible with both Android and iOS operating systems and supports multiple file formats. For security purposes, data can be encrypted.

■Objective Lenses

The four-position turret holds objective lenses with magnifications ranging from 5X to 100X, to support nano-, micro- and macro-topography applications. The 5X objective is a Michelson interferometry objective. The 10X, 20X, 50X, and 100X objectives are Mirau interferometry objectives.

■Stages

Motorized stages for the X-Y and Z axes are standard on the Profilm3D system. The X-Y stage has a travel of 100mm by 100mm for Profilm3D, and 200mm by 200mm for Profilm3D-200. The Z stage has a range of 100mm. The travel along all axes of motion is programmable. A manual tip and tilt stage are standard with ±5° of motion.

A manual R-theta wafer stage is also available on Profilm3D series optical profilometers, supporting 50mm- to 200mm-diameter wafers. In addition, the Profilm3D-200 supports an adapter for holding up to 200mm wafers.

■Isolation Tables

The Filmetrics Profilm3D series offers Accurion Nano30 Series active tabletop vibration isolation systems, which use electro-dynamic drive active vibration isolation in all six degrees of freedom.

 

■Step Height Standards

The Filmetrics Profilm3D series includes a custom-designed Cr on Si 10µm step height standard, consisting of an etched step with a chrome coating. A multi-step height standard is also available as an option, featuring 0.1µm, 2µm and 4µm steps.

■Step Height

The Filmetrics Profilm3D series white light interferometry-based profilometers support non-contact measurement of 3D step heights from nanometer to millimeter scales. Vertical scanning interferometry can measure a large step height with nanometer-level resolution. Sub-nanometer-level features can be measured rapidly using phase-shifting interferometry. Z-stitching interferometry enables rapid measurement of very large steps with multiple high-resolution scans that are combined into a single measurement. This variety of techniques enables users to quantify the amount of material removed or deposited by semiconductor processes such as etch, sputter, deposition, spin coating and more.

 

■Texture: Roughness and Waviness

The Filmetrics Profilm3D series optical profilers provide non-contact measurements of 3D texture, quantifying the sample’s roughness and waviness. Phase-shifting mode is ideal for very smooth surfaces. Software filters separate the measurement into roughness and waviness components and calculate parameters such as root mean square (RMS) roughness.

 

■Form: Bow and Shape

The Filmetrics Profilm3D series non-contact, white light interferometry-based profilers can measure the 3D shape or bow of a surface. This capability can be used to measure the radius of curvature of a lens or the shape of a medical implant, such as a hip joint or stent.

 

■TotalFocus®

The Filmetrics Profilm3D series optical profilometers with TotalFocus capture True Color 3D images with every pixel in focus. This feature can be used to distinguish boundaries between materials with different optical properties.

 

 

 

KLA_AppNote_Stylus_SIMS_Crater.pdf

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